Laser processing system and light irradiator

A laser processing system comprising:

• a first light irradiator including:
• a first light emitter configured to emit first laser light;
• and
• a first light scanner configured to scan a first region of a workpiece with the first laser light emitted from the first light emitter;
• a second light irradiator including:
• a second light emitter configured to emit second laser light;
• and
• a second light scanner configured to scan a second region different from the first region of the workpiece with the second laser light emitted from the second light emitter,
• and
• wherein:
• the first light irradiator emits the first laser light to the first region of the workpiece in a first irradiation direction,
• the second light irradiator emits the second laser light to the second region of the workpiece in a second irradiation direction opposite to the first irradiation direction,
• the first light irradiator includes a first light scanner including:
• a first light deflector;
• and
• a first optical element attached to the first light deflector,
• the second light irradiator includes a second light scanner including:
• a second light deflector;
• and
• a second optical element attached to the second light deflector, and
• the laser processing system satisfy a following condition in which:
• L>(WD1+d/2)×tan(θ½)+CA½+(WD2+d/2)×tan(θ2/2)+CA2/2, (1)
• where L (mm) is a distance between a center of the optical axis of the first light irradiator and a center of the optical axis of the second light irradiator,
• θ1 (°) is a deflection angle of the first light deflector,
• θ2 (°) is a deflection angle of the second light deflector,
• WD1 (mm) is a working distance of the first imaging optical elemental element,
• WD2 (mm) is a working distance of the second imaging optical element,
• CA1 (mm) is a diameter of an aperture of the first imaging optical element,
• CA2 (mm) is a diameter of an aperture of the second imaging optical element, and
• d (mm) is a maximum diameter of the workpiece.