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US 12,235,563 B2Granted
Tunable optical filter device
AssigneeShenzhen Hypernano Optics Technology Co., Ltd.
InventorBin Guo
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AssigneeShenzhen Hypernano Optics Technology Co., Ltd.
InventorBin Guo
Estimating the term…
A tunable optical filter device. The device comprises a first substrate (101) provided with a first reflective structure (106) and a thin film (103) provided with a second reflective structure (107), the outer peripheries of the surfaces of the first substrate (101) and the thin film (103) having the reflective structures are mutually bonded by means of bonding compounds (102) so as to form a cavity between the reflective structures, and a piezoelectric thin film structure (108) is provided on a surface of the thin film (103) at the cavity side. The tunable optical filter device can avoid a pull-in effect caused by capacitor driving, thereby improving the movable range of the thin film (103), and correspondingly expanding the tunable range of the spectrum of the Fabry-Perot cavity; in addition, the tunable optical filter device can be applied to a device with a limited size, such as a micro spectrometer, a miniaturized or even a mini-hyperspectral camera or a mobile phone.
A tunable optical filter device, wherein the device comprises a first substrate having a first reflective structure and a thin film having a second reflective structure, the thin film is formed on a second substrate, and the second substrate is disposed on a surface of the thin film opposite to the second reflective structure, and part of the second substrate positional corresponding to the second reflective structure is partly removed, surfaces of the first substrate and the thin film on which the reflective structure are located are bonded to each other at the periphery through a bonding compound to form a cavity between the reflective structures, and the surface of the thin film at the cavity side are provided with a piezoelectric thin film structure.
Dependencies are inferred from the claim text.