Energy measurement apparatus, energy computation apparatus, energy measurement method, and energy computation program

An energy computation apparatus comprising:

• a clocking unit configured to measure elapsed time with a point in time when particle radiation is emitted from a target, the target being irradiated with a particle to emit the particle radiation, defined as a starting point;
• a measurement unit configured to measure voltage or current output from an output circuit including a semiconductor element, the output circuit being configured to output the voltage or the current during normal operation;
• and
• a calculation unit configured to calculate time of flight of the particle radiation based on a time when a measurement value measured by the measurement unit falls below a predetermined threshold value and the elapsed time measured by the clocking unit, the calculation unit being configured to calculate energy of the particle radiation based on the calculated time of flight.

An energy measurement method comprising:

• irradiating a target with a particle to emit particle radiation;
• irradiating, with the particle radiation, a substrate mounted with an output circuit including a semiconductor element, the output circuit configured to output voltage or current during normal operation;
• measuring, at a clocking unit, elapsed time with a point in time when the particle radiation is emitted from the target defined as a starting point;
• measuring, at a measurement unit, the voltage or the current output from the output circuit;
• and
• calculating, at a calculation unit, time of flight of the particle radiation based on a time when a measurement value measured by the measurement unit falls below a predetermined threshold value and the elapsed time measured by the clocking unit and calculating, at the calculation unit, energy of the particle radiation based on the calculated time of flight.

A non-transitory computer-readable storage medium storing an energy computation program, wherein executing of the energy computation program causes one or more computers to perform operations comprising:

• measuring elapsed time with a point in time when particle radiation is emitted from a target, the target being irradiated with a particle to emit the particle radiation, defined as a starting point;
• measuring voltage or current output from an output circuit including a semiconductor element, the output circuit being configured to output the voltage or the current during normal operation;
• and
• calculating time of flight of the particle radiation based on a time when a measurement value falls below a predetermined threshold value and the elapsed time and calculating energy of the particle radiation based on the calculated time of flight.