Vacuum pump and vacuum pump rotor blade
AssigneeEdwards Japan Limited
InventorsTakashi Kabasawa, Kengo Saegusa
Life of this patent
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Abstract
A vacuum pump and a vacuum pump rotor blade that can effectively limit deposition of reaction products are provided. The vacuum pump includes a rotating shaft held rotationally, a drive mechanism for the rotating shaft, a first rotor blade made of a first material, a second rotor blade made of a second material having higher heat resistance than the first material, and disposed further toward a downstream side than the first rotor blade, and a casing enclosing the rotating shaft, the first rotor blade, and the second rotor blade. The second rotor blade is disposed, via a heat insulating portion, on the first rotor blade.
Claims11
A vacuum pump comprising:
- a rotating shaft held rotationally;
- a drive mechanism for the rotating shaft;
- a first rotor blade made of a first material and forming a turbomolecular pump mechanism;
- a second rotor blade made of a second material having higher heat resistance than the first material, and disposed further toward a downstream side than the first rotor blade, the second rotor blade forming a drag pump mechanism;
- and
- a casing enclosing the rotating shaft, the first rotor blade, and the second rotor blade, wherein
- the second rotor blade is disposed, via a cylindrical heat insulating portion extending in an axial direction and disposed on an inside of the first rotor blade in a radial direction, on at least one of the rotating shaft or the first rotor blade, the heat insulating portion has a smaller thickness than a thickness in the radial direction of an upstream portion of the second rotor blade, and
- an outermost radial position at which a portion continuously connecting from the heat insulating portion upward contacts the at least one of the rotating shaft or the first rotor blade is located radially inward from an outer circumference of the heat insulating portion.
A vacuum pump rotor blade comprising:
- a first rotor blade made of a first material and forming a turbomolecular pump mechanism;
- and
- a second rotor blade made of a second material having higher heat resistance than the first material, and disposed further toward a downstream side than the first rotor blade, the second rotor blade forming a drag pump mechanism, wherein
- the second rotor blade is disposed, via a cylindrical heat insulating portion extending in an axial direction and disposed on an inside of the first rotor blade in a radial direction, on the first rotor blade, the heat insulating portion has a smaller thickness than a thickness in the radial direction of an upstream portion of the second rotor blade, and
- an outermost radial position at which a portion continuously connecting from the heat insulating portion upward contacts the at least one of the rotating shaft or the first rotor blade is located radially inward from an outer circumference of the heat insulating portion.
Dependencies are inferred from the claim text.