Ultraviolet and ozone cleaning apparatus and method of using

A cleaning apparatus for cleaning a substrate, comprising:

• a UV lamp assembly comprising a UV lamp, disposed over a substrate support disposed within a cleaning chamber, and
• a water inlet for receiving a supply of ozonated water and a water outlet disposed above the substrate support for discharging ozonated water irradiated by the UV lamp assembly into contact with the substrate when disposed on the substrate support;
• wherein the UV lamp assembly is configured such that, in operation, UV electromagnetic radiation emitted by the UV lamp assembly contacts the ozonated water and the substrate within the cleaning chamber;
• wherein the UV lamp is in thermal communication with a cooling fluid;
• wherein the cleaning apparatus further comprises at least one of a sensor configured to determine a temperature of the UV lamp and/or a UV detector;
• wherein a flow of the cooling fluid is controlled based at least in part on the temperature of the UV lamp and/or a signal from the UV detector, such that, in operation, greater than or equal to about 50% of UV electromagnetic radiation emitted by the UV lamp assembly has a wavelength of greater than or equal to about 280 nm,
• wherein the cleaning apparatus comprises the UV detector;
• and wherein the flow of the cooling fluid is controlled based at least in part on the signal from the UV detector.