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AssigneesKabushiki Kaisha Toshiba, Toshiba Energy Systems & Solutions Corporation
InventorsKatsuyuki Naito, Naomi Shida, Kohei Nara, Takahiro Kokubo, Hiroaki Hirazawa, Yutaka Saita
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According to one embodiment of the invention, a coating apparatus includes a first pipe, a first pump, a first nozzle, a second nozzle, and a holder. The first pipe includes a first inflow port, a first outflow port, and a second outflow port. The first pump is configured to supply liquid toward the first inflow port. The first nozzle includes a first nozzle inflow port and a first nozzle discharge port. The first nozzle inflow port is connected to the first outflow port. The first nozzle discharge port is configured to discharge the liquid passing through the first pipe. The second nozzle includes a second nozzle inflow port and a second discharge port. The second nozzle inflow port is connected to the second outflow port. The second nozzle discharge port is configured to discharge the liquid passing through the first pipe. The holder holds the first nozzle and the second nozzle. The holder is configured to form a first state and a second state. In the first state, a height of the first nozzle discharge port and a height of the second nozzle discharge port are not less than a height of the first pipe. In the second state, the height of the first nozzle discharge port and the height of the second nozzle discharge port are lower than the height of the first pipe.
A coating apparatus, comprising:
Dependencies are inferred from the claim text.