Laser amplification device and extreme ultraviolet light generation apparatus
AssigneeMitsubishi Electric Corporation
InventorsYuzuru Tadokoro, Tatsuya Yamamoto, Junichi Nishimae
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Abstract
A laser amplification device includes a laser oscillator that includes a first laser active medium including a mixed gas containing carbon dioxide gas and emits pulsed laser light with the full width at half maximum of between 15 ns to 200 ns, and a laser amplifier that includes a second laser active medium including a mixed gas containing carbon dioxide gas through which the pulsed laser light emitted from the laser oscillator passes to be shortened to pulsed laser light with the full width at half maximum of between 5 ns and 30 ns to be output.
Claims7
A laser amplification device comprising:
- a laser oscillator including a first laser active medium including a mixed gas containing carbon dioxide gas to emit pulsed laser light with a full width at half maximum of between 15 ns to 200 ns;
- and
- a laser amplifier including a second laser active medium including a mixed gas containing carbon dioxide gas through which the pulsed laser light emitted from the laser oscillator passes to be shortened to pulsed laser light with a full width at half maximum of between 5 ns and 30 ns to be output, wherein
- a value obtained by dividing a rise time that is a time from when intensity of the pulsed laser light output from the laser oscillator rises to 10% of a maximum intensity to when the intensity rises to 90% of the maximum intensity by the full width at half maximum of the pulsed laser light output from the laser oscillator is smaller than 0.72.
Dependencies are inferred from the claim text.