Semiconductor device and method of manufacture
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTai-I Yang, Wei-Chen Chu, Yung-Chih Wang, Chia-Tien Wu, Hsin-Ping Chen, Shau-Lin Shue
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Abstract
A semiconductor device includes a conductive line and a conductive via contacting the conductive line. A first dielectric material contacts a first sidewall surface of the conductive via. A second dielectric material contacts a second sidewall surface of the conductive via. The first dielectric material includes a first material composition, and the second dielectric material includes a second material composition different than the first material composition.
Claims20
A semiconductor device, comprising:
- a conductive line;
- an etch stop layer contacting a first portion of a top surface of the conductive line;
- a conductive via contacting a second portion of the top surface of the conductive line;
- and
- a first dielectric layer overlying the etch stop layer and disposed between a first portion of a sidewall of the etch stop layer and a first portion of a sidewall of the conductive via.
A semiconductor device, comprising:
- a conductive via;
- a first dielectric material contacting a first sidewall of the conductive via;
- and
- a second dielectric material contacting a second sidewall of the conductive via, wherein:
- the first dielectric material comprises a first material composition,
- the second dielectric material comprises a second material composition different than the first material composition;
- and
- the second dielectric material overlies the first dielectric material.
A semiconductor device, comprising:
- a first dielectric material;
- an etch stop layer;
- a second dielectric material, wherein the etch stop layer is between the first dielectric material and the second dielectric material in a lateral direction;
- and
- a conductive via, wherein the second dielectric material is between the etch stop layer and the conductive via in the lateral direction.
Dependencies are inferred from the claim text.