Exhaust system and process equipment
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsien-Chang Hsieh, Chun-Chih Lin, Tah-te Shih, Wen-Hsong Wu, Chune-Te Yang, Yu-Jen Su
Life of this patent
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Abstract
An exhaust structure includes a piping section, wherein the piping section has a first inner diameter in a central region of the piping section, the piping section has a second diameter in at least one of an inlet or an outlet, and the second diameter has a same value as the first inner diameter. The exhaust structure further includes a plurality of smoothing layers configured to resist turbulence and condensation produced by a flow of one or more gasses in the piping section.
Claims20
An exhaust structure comprising:
- a piping section, wherein the piping section has a first inner diameter in a central region of the piping section;
- an intake section connected to the piping section, wherein the intake section has the first inner diameter at a position of the intake section farthest from the central region;
- an output section connected to the piping section, wherein the output section comprises a curved portion configured to change a direction of exhaust passing through the exhaust structure, and the output section has the first inner diameter at a position of the output section farthest from the central region;
- and
- a plurality of smoothing layers configured to resist turbulence and condensation produced by a flow of one or more gases in the piping section.
A process equipment comprising:
- a process chamber configured to receive a substrate;
- an exhaust system connected to the process chamber, wherein the exhaust system comprises:
- a piping section, wherein the piping section has uniform inner diameter;
- and
- a plurality of smoothing layers configured to resist turbulence and condensation produced by a flow of one or more gases in the piping section;
- and
- a flow regulator between the process chamber and the exhaust system, wherein the flow regulator comprises a plurality of plates, wherein each of the plurality of plates extends perpendicular to an exhaust path from the process chamber to the exhaust system.
An exhaust structure comprising:
- a piping section, wherein the piping section has a first inner diameter in a central region of the piping section, the first inner diameter is uniform, the piping section has a second diameter at an inlet in direct contact with the central region, and the second diameter has a same value as the first inner diameter;
- an input section attached to the inlet, wherein the input section comprises a curved portion configured to change a direction of exhaust passing through the exhaust structure, and the input section has the second diameter at a location farthest from the piping section;
- and
- a plurality of smoothing layers configured to resist turbulence and condensation produced by a flow of one or more gases in the piping section.
Dependencies are inferred from the claim text.