MEMS relay

A method for producing a microelectromechanical system (MEMS) relay, comprising the following steps:

• providing a movable switching element, on which a second switching surface is arranged in a first end section;
• providing a substrate having a first switching surface arranged thereon, which is configured to interact with the second switching surface;
• providing a switching electrode, which is configured for application of an electrical switching voltage, the movable switching element being able to bring the second switching surface into contact with the first switching surface by way of an electrostatic force generated by the electrical switching voltage;
• providing at least one second compensation surface arranged in an end section of the movable switching element opposite the second switching surface;
• and
• providing a first compensation surface, which is configured to interact with the at least one second compensation surface and is galvanically connected to the first switching surface via a cable.