System and method of measuring capacitance of device-under-test

A system of measuring capacitance of a plurality of device-under-test (DUTs), comprising:

• a plurality of first switches each have a first terminal configured to receive a first supply voltage, V1, and a second terminal electrically connected to a first terminal of a corresponding one of DUTs;
• a plurality of second switches each have a first terminal electrically connected to the first terminal of the corresponding DUT and a second terminal electrically connected to ground;
• a capacitance measurement device configured to provide a first pair of non-overlapping periodic signals with a first frequency, F1, and a second pair of non-overlapping periodic signals with a second frequency, F2, wherein the second frequency is β times the first frequency;
• and
• a controller configured to determine a DUT to be measured from the DUTs,
• wherein, when the first switch and second switch corresponding to the measured DUT receive the first pair of non-overlapping periodic signals, a first current, I1, is transmitted through the first switch and the second switch,
• wherein, when the first switch and second switch corresponding to the measured DUT receive the second pair of non-overlapping periodic signals, a second current, I2, is transmitted through the first switch and the second switch, and
• wherein the measured capacitance of the measured DUT is calculated based on (I2−I1)/[(β−1)*V1*F1].

A method of measuring capacitance of a device-under-test (DUT), comprising:

• receiving a first supply voltage V1 by a first switch of a measuring system;
• providing a first pair of non-overlapping periodic signals with a first frequency F1 by a capacitance measurement device of the measuring system;
• providing a second pair of non-overlapping periodic signals with a second frequency F2 by the capacitance measurement device, wherein the second frequency is β times the first frequency;
• receiving a first current I1 through the first switch and a second switch of the measuring system when providing the first pair of non-overlapping periodic signals to the first switch and the second switch;
• receiving a second current I2 through the first switch and the second switch when providing the second pair of non-overlapping periodic signals to the first switch and the second switch;
• and
• calculating the measured capacitance of the DUT based on (I2−I1)/[(β−1)*V1*F1].