Focusing grating devices with large aspect ratio
AssigneeKoninklijke Philips N.V.
InventorsThomas Koehler, Gereon Vogtmeier
Life of this patent
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Abstract
A focusing grating device (100) is described comprising a substrate (402) and a grating comprising a plurality of grating features (408) positioned on the substrate (402). The grating features (408) are positioned non-perpendicular to the substrate surface, thereby inducing a first focusing direction. The substrate (402) is curved, thereby inducing a second focusing direction, which is different from the first focusing direction. An X-ray system (300) comprising such a focusing grating device (100) as well as a method for producing such a focusing grating device (100) are also described.
Claims12
A focusing grating device for focusing in a first focusing direction and a second focusing direction for an X-ray radiation beam, the first focusing direction being different from the second focusing direction, the focusing grating device comprising:
- a stack comprising a substrate and a resist layer;
- wherein the stack is bent in the first focusing direction;
- wherein a lithographic process on the stack is performed while the substrate is bent in the first focusing direction;
- wherein a grating material is electroplated to form grating features;
- wherein the bending of the stack is substantially reversed, and
- wherein after said reversing the bending, a further bending of the stack is applied to induce the second focusing direction.
A method for producing a focusing grating device for focusing in a first focusing direction and a second focusing direction for an X-ray radiation beam, the first focusing direction being different from the second focusing direction, the method comprising:
- providing a stack of at least a substrate and a resist layer;
- applying a bending of the stack in the first focusing direction;
- performing a lithographic process on the stack while the substrate is bent in the first focusing direction;
- electroplating a grating material so as to form grating features;
- substantially reversing the bending of the stack, and
- after said reversing the bending, applying a further bending of the stack to induce the second focusing direction in the focusing grating device.
Dependencies are inferred from the claim text.