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US 12,228,404 B2Granted
Drive and sense balanced, semi-coupled 3-axis gyroscope
AssigneeInvenSense, Inc.
InventorsDoruk Senkal, Robert Hennessy, Houri Johari-Galle, Joseph Seeger
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Abstract
A dynamically balanced 3-axis gyroscope architecture is provided. Various embodiments described herein can facilitate providing linear and angular momentum balanced 3-axis gyroscope architectures for better offset stability, vibration rejection, and lower part-to-part coupling.
Claims12
A method, comprising:
- transducing a first component of angular velocity associated with motion of a microelectromechanical systems (MEMS) device around a first axis with at least one frame gyroscope;
- and
- transducing a second component of angular velocity associated with motion of the MEMS device around a second axis with at least two proof masses, wherein the first axis and the second axis are orthogonal, and wherein the at least two proof masses are driven into oscillation via at least two drive shuttles coupled to the at least one frame gyroscope, and wherein the at least two drive shuttles are configured to be constrained to a motion associated with the at least two drive shuttles in a plane defined by the at least two drive shuttles.
A method, comprising:
- forming a first set of gyroscopes comprising at least one frame gyroscope configured to sense a first component of angular velocity associated with a microelectromechanical systems (MEMS) device around a first axis;
- forming a set of drive shuttles comprising respective guided masses and coupled to the at least one frame gyroscope;
- and
- forming a second set of gyroscopes comprising at least two proof masses coupled with respective ones of the set of drive shuttles and configured to sense a second component of angular velocity associated with the MEMS device around a second axis, wherein the first axis and the second axis are orthogonal, and wherein the at least two proof masses are configured to be driven into oscillation via respective drive shuttles coupled to the at least one frame gyroscope.
1 more element
Dependencies are inferred from the claim text.