Sealing article comprising metal coating, method of making and method of using the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPeng-Cheng Hong, Jun-Liang Pu, W. L. Hsu, Chung-Hao Kao, Chia-Chun Hung, Cheng-Yi Wu, Chin-Szu Lee
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Abstract
A sealing article includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.
Claims20
A method of using a sealing article, comprising step of:
- installing the sealing article in a semiconductor processing chamber,
- wherein the sealing article comprises a body comprising a polymeric elastomer, and a coating layer disposed on a top surface of the body, the coating layer comprising at least one metal, and wherein the body has a whole cross-section in a semi-circular or semi-elliptical shape, the top surface of the body is a flat surface, and the coating layer is a layer disposed on the flat surface of the body only.
A method of using a sealing article, comprising:
- installing the sealing article in a semiconductor processing chamber,
- wherein the sealing article comprises a body comprising a polymeric elastomer, and a coating layer disposed on at least one surface of the body, the coating layer comprising at least one metal,
- wherein the polymeric elastomer comprises perfluoroelastomer (FFKM),
- wherein the body has a whole cross-section in a semi-circular or semi-elliptical shape, the top surface of the body is a flat surface, and the coating layer is a layer disposed on the flat surface of the body only, and
- wherein the coating layer on the top surface of the body is configured to face toward radiation in a semiconductor processing chamber and reflect or absorb the radiation.
A method of using a sealing article, comprising:
- installing the sealing article in a semiconductor processing chamber,
- wherein the sealing article comprises a body comprising a polymeric elastomer, and a coating layer disposed on at least one surface of the body, the coating layer comprising at least one metal,
- wherein the polymeric elastomer comprises perfluoroelastomer (FFKM), and wherein the FFKM comprises a copolymer,
- wherein the body has a whole cross-section in a semi-circular or semi-elliptical shape, the top surface of the body is a flat surface, and the coating layer is a layer disposed on the flat surface of the body only,
- wherein the body defines pores on the flat surface, and the at least one metal penetrates into the pores, and
- wherein the coating layer on the top surface of the body is configured to face toward radiation in a semiconductor processing chamber and reflect or absorb the radiation.
Dependencies are inferred from the claim text.