Preparation device and preparation method for alloy targets

Abstract

A preparation device for an alloy target includes a material nozzle, a high-energy laser, and a target support substrate, the material nozzle and the high-energy laser are respectively arranged above the target support substrate. The preparation device uses the material nozzle to spray the material powder required for the alloy target to be prepared, the injection efficiency is independently adjusted to achieve the purpose of non-fixed composition of the alloy target, and the spatial position and angle of the material nozzle are independently adjusted to ensure uniform composition and density of the target, the high-energy laser beam generated by the high-energy laser is used to heat the material powder in the spraying area to form a target coating of the required composition, the target support substrate is used to support the target coating formed by the material powder.

Dependencies are inferred from the claim text.