Laminate peeling method, laminate, and laminate production method
AssigneeNissan Chemical Corporation
InventorsKazuhiro Sawada, Shunsuke Moriya, Tetsuya Shinjo
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AssigneeNissan Chemical Corporation
InventorsKazuhiro Sawada, Shunsuke Moriya, Tetsuya Shinjo
Estimating the term…
A laminate debonding method includes producing a laminate by joining a first substrate formed of a semiconductor-forming substrate to a second substrate formed of a support substrate which allows passage of infrared laser light, by the mediation of a first adhesive layer provided on the first substrate and a second adhesive layer provided on the second substrate, wherein the first adhesive layer is obtained by curing an adhesive (A) containing a component which is cured through hydrosilylation, and the second adhesive layer is obtained by use of an adhesive (B) formed of a polymer adhesive having an aromatic ring in at least one of a main chain and a side chain and which allows passage of infrared laser light; and irradiating the laminate with infrared laser light from a second substrate side for debonding the second substrate at the interface between the first and second adhesive layers.
A laminate debonding method, the method comprising:
Dependencies are inferred from the claim text.