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US 12,224,474 B2Granted
Power-efficient microwave plasma jet based on evanescent-mode cavity technology
AssigneeThe University of Toledo
InventorsAbbas Semnani, Kazi Sadman Kabir
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Abstract
Plasma jet assemblies utilizing evanescent mode cavity resonators, and methods of making the same and using the same, are described.
Claims20
A plasma jet assembly comprising:
- a cavity resonator;
- a metallic material disposed in the cavity resonator;
- a radio frequency port configured to receive a radio frequency connector configured to couple electromagnetic energy into the cavity resonator;
- and
- a gas channel within the metallic material and configured to direct a flow of a gas (i) to a space adjacent the metallic material where an electric field concentrates upon the coupling of electromagnetic energy from the radio frequency connector, and (ii) in a direction out of the plasma jet assembly.
2 more elements
A plasma jet assembly comprising:
- a first substrate;
- a second substrate disposed over the first substrate;
- an outer perimeter of via-holes formed through the first substrate and the second substrate;
- a cavity resonator formed within the outer perimeter of via-holes;
- an inner perimeter of via-holes formed through the first substrate and within the outer perimeter of via-holes;
- a radio frequency port disposed adjacent to the first substrate and the second substrate, the radio frequency port configured to receive a radio frequency connector configured to couple electromagnetic energy into the cavity resonator;
- and
- a central via-hole formed through the first substrate and the second substrate and within the inner perimeter of via-holes, the central via-hole configured to direct a flow of a gas (i) to a space within the inner perimeter of via-holes where an electric field concentrates upon the coupling of electromagnetic energy from the radio frequency connector, and (ii) in a direction through the central via-hole and out of the plasma jet assembly.
5 more elements
A plasma jet assembly comprising:
- a cavity resonator defined by a base surface and cavity walls;
- a ceiling assembly having an inner surface and an outer surface, the inner surface disposed over the cavity resonator;
- a metallic post disposed in the cavity resonator;
- a radio frequency port configured to receive a radio frequency connector configured to couple electromagnetic energy into the cavity resonator;
- a space formed between the metallic post and the ceiling assembly;
- a plasma jet outlet defined by the ceiling assembly;
- and
- a gas channel within the metallic post and configured to direct a flow of a gas (i) to the space where an electric field concentrates upon the coupling of electromagnetic energy from the radio frequency connector, and (ii) in a direction through the plasma jet outlet and out of the plasma jet assembly.
5 more elements
Dependencies are inferred from the claim text.