# US 12,224,286 B2 · Symmetric dual-sided MOS IC

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- Number: US 12,224,286 B2
- Document ID: US12224286B2
- Status: Granted
- Kind: B2
- Application number: 17/481,618
- Filed: 2021-09-22
- Published: 2023-03-23
- Granted: 2025-02-11
- Earliest claimed: 2021-09-22
- Assignees: QUALCOMM Incorporated
- Applicants: QUALCOMM Incorporated
- Inventors: Ravi Pramod Kumar Vedula; Vikram Sekar
- Web page: https://patentgrep.com/patent/US12224286B2

## CPC

- H10D 86/201: {the substrates comprising an insulating layer on a semiconductor body, e.g. SOI (H10D86/40 take precedence)}
- H10W 20/484: {Interconnections having extended contours, e.g. pads having mesh shape or interconnections comprising connected parallel stripes}
- H10D 86/215: {comprising FinFETs}
- H10W 20/20: Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
- H10W 20/43: Layouts of interconnections
- H10W 20/481: {on the rear surfaces of the wafers or substrates}
- H10W 44/20: at high-frequency [HF] or radio frequency [RF]
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A dual-sided MOS IC includes an isolation layer and a MOS transistor. The isolation layer separates the MOS IC into a MOS IC frontside and a MOS IC backside. The MOS transistor is on both the MOS IC frontside and the MOS IC backside. The MOS transistor includes MOS gates, a first source connection in a first subsection of the MOS IC frontside, and a second source connection in a second subsection of the MOS IC backside. The first and second source connections are electrically coupled together through a first front-to-backside connection extending through the isolation layer. The MOS transistor further includes a first drain connection in the first subsection of the MOS IC backside, and a second drain connection in the second subsection of the MOS IC frontside. The first and second drain connections are electrically coupled together through a second front-to-backside connection extending through the isolation layer.

## Claims

### Claim 1

A dual-sided metal oxide semiconductor (MOS) integrated circuit (IC), comprising:
an isolation layer extending in a first direction and a second direction and separating the MOS IC into a MOS IC frontside and a MOS IC backside, the MOS IC having a first subsection and a second subsection adjacent to each other in the first direction, the first subsection and the second subsection being separated at an imaginary plane extending in the second direction and a third direction through the MOS IC, where the first direction, the second direction, and the third direction are each orthogonal to each other; and
a MOS transistor on the MOS IC, the MOS transistor comprising:
a plurality of MOS gates extending in the second direction;
a first source connection extending parallel to the MOS gates and to the isolation layer in the first subsection of the MOS IC frontside;
a second source connection extending parallel to the MOS gates and to the isolation layer in the second subsection of the MOS IC backside, the first and second source connections being electrically coupled together through a first front-to-backside connection extending in the third direction through the isolation layer;
a first drain connection extending parallel to the MOS gates and to the isolation layer in the first subsection of the MOS IC backside; and
a second drain connection extending parallel to the MOS gates and to the isolation layer in the second subsection of the MOS IC frontside, the first and second drain connections being electrically coupled together through a second front-to-backside connection extending in the third direction through the isolation layer.

### Claim 2 (depends on 1)

The dual-sided MOS IC of claim 1, wherein the first source connection, the second source connection, the first drain connection, and the second drain connection each comprise a plurality of fingers extending in the second direction.

### Claim 3 (depends on 1)

The dual-sided MOS IC of claim 1, wherein the first front-to-backside connection and the second front-to-backside connection are offset from the imaginary plane.

### Claim 4 (depends on 1)

The dual-sided MOS IC of claim 1, wherein the first front-to-backside connection and the second front-to-backside connection are approximately aligned with the imaginary plane.

### Claim 5 (depends on 1)

The dual-sided MOS IC of claim 1, wherein the first front-to-backside connection and the second front-to-backside connection are approximately symmetric to each other with respect to the imaginary plane.

### Claim 6 (depends on 1)

The dual-sided MOS IC of claim 1, wherein the first source connection and the second drain connection are approximately symmetric to each other with respect to the imaginary plane, and the first drain connection and the second source connection are approximately symmetric to each other with respect to the imaginary plane.

### Claim 7 (depends on 1)

The dual-sided MOS IC of claim 1, wherein the MOS IC has a third subsection adjacent to the first subsection in the first direction, the first subsection and the third subsection being separated at a second imaginary plane extending in the second direction and the third direction through the MOS IC, and wherein the MOS transistor further comprises:
a third drain connection extending parallel to the MOS gates and to the isolation layer in the third subsection of the MOS IC frontside, the first and third drain connections being electrically coupled together through a third front-to-backside connection extending in the third direction through the isolation layer; and
a third source connection extending parallel to the MOS gates and to the isolation layer in the third subsection of the MOS IC backside, the first and third source connections being electrically coupled together through a fourth front-to-backside connection extending in the third direction through the isolation layer.

### Claim 8 (depends on 7)

The dual-sided MOS IC of claim 7, wherein the first source connection and the third drain connection are approximately symmetric to each other with respect to the second imaginary plane, and the first drain connection and the third source connection are approximately symmetric to each other with respect to the second imaginary plane.

### Claim 9 (depends on 1)

The dual-sided MOS IC of claim 1, wherein the MOS IC has a third subsection adjacent to the second subsection in the first direction, the second subsection and the third subsection being separated at a second imaginary plane extending in the second direction and the third direction through the MOS IC, and wherein the MOS transistor further comprises:
a third source connection extending parallel to the MOS gates and to the isolation layer in the third subsection of the MOS IC frontside, the second and third source connections being electrically coupled together through a third front-to-backside connection extending in the third direction through the isolation layer; and
a third drain connection extending parallel to the MOS gates and to the isolation layer in the third subsection of the MOS IC backside, the second and third drain connections being electrically coupled together through a fourth front-to-backside connection extending in the third direction through the isolation layer.

### Claim 10 (depends on 9)

The dual-sided MOS IC of claim 9, wherein the second source connection and the third drain connection are approximately symmetric to each other with respect to the second imaginary plane, and the second drain connection and the third source connection are approximately symmetric to each other with respect to the second imaginary plane.

### Claim 11 (depends on 1)

The dual-sided MOS IC of claim 1, further comprising:
a first signal bus on one of the MOS IC frontside or the MOS IC backside, the first signal bus being coupled to one of the first source connection or the second source connection; and
a second signal bus on an other one of the MOS IC frontside or the MOS IC backside, the second signal bus being coupled to one of the first drain connection or the second drain connection.

### Claim 12 (depends on 1)

The dual-sided MOS IC of claim 1, further comprising:
a first signal bus extending alternately on the MOS IC frontside and the MOS IC backside, the first signal bus being coupled to both the first source connection and the second source connection; and
a second signal bus extending alternately on the MOS IC frontside and the MOS IC backside, the second signal bus being interleaved with the first signal bus on both the MOS IC frontside and the MOS IC backside, the second signal bus being coupled to both the first drain connection and the second drain connection.

### Claim 13 (depends on 12)

The dual-sided MOS IC of claim 12, wherein the first signal bus extends on a higher layer than the first source connection on the MOS IC frontside and the second source connection on the MOS IC backside, and the second signal bus extends on a higher layer than the first drain connection on the MOS IC backside and the second drain connection on the MOS IC frontside.

### Claim 14 (depends on 1)

The dual-sided MOS IC of claim 1, wherein the MOS IC has a third subsection and a fourth subsection adjacent to each other in the first direction, the third subsection and the fourth subsection being separated at the imaginary plane, the first subsection and the third subsection being adjacent to each other in the second direction, the second subsection and the fourth subsection being adjacent to each other in the second direction, the first subsection and the third subsection being separated at a second imaginary plane extending in the first direction and the third direction through the MOS IC, the second subsection and the fourth subsection being separated at the second imaginary plane; and wherein the MOS transistor further comprises:
a third source connection extending parallel to the MOS gates and to the isolation layer in the third subsection of the MOS IC frontside;
a fourth source connection extending parallel to the MOS gates and to the isolation layer in the fourth subsection of the MOS IC backside, the third and fourth source connections being electrically coupled together through a third front-to-backside connection extending in the third direction through the isolation layer, the third and fourth source connections being coupled to the first and second source connections;
a third drain connection extending parallel to the MOS gates and to the isolation layer in the third subsection of the MOS IC backside; and
a fourth drain connection extending parallel to the MOS gates and to the isolation layer in the fourth subsection of the MOS IC frontside, the third and fourth drain connections being electrically coupled together through a fourth front-to-backside connection extending in the third direction through the isolation layer, the third and fourth drain connections being coupled to the first and second drain connections.

### Claim 15 (depends on 14)

The dual-sided MOS IC of claim 14, wherein the first front-to-backside connection and the third front-to-backside connection are a same front-to-backside connection, the third and fourth source connections are coupled to the first and second source connections at the same front-to-backside connection, and the second front-to-backside connection and the fourth front-to-backside connection are different front-to-backside connections coupled together.

### Claim 16 (depends on 14)

The dual-sided MOS IC of claim 14, wherein the first front-to-backside connection and the third front-to-backside connection are different front-to-backside connections coupled together, the second front-to-backside connection and the fourth front-to-backside connection are a same front-to-backside connection, and the third and fourth drain connections are coupled to the first and second drain connections at the same front-to-backside connection.

### Claim 17 (depends on 14)

The dual-sided MOS IC of claim 14, wherein the first source connection and the second drain connection are approximately symmetric to each other with respect to the imaginary plane, the first drain connection and the second source connection are approximately symmetric to each other with respect to the imaginary plane, the third source connection and the fourth drain connection are approximately symmetric to each other with respect to the imaginary plane, the third drain connection and the fourth source connection are approximately symmetric to each other with respect to the imaginary plane, the first source connection and the third source connection are approximately symmetric to each other with respect to the second imaginary plane, the first drain connection and the third drain connection are approximately symmetric to each other with respect to the second imaginary plane, the second source connection and the fourth source connection are approximately symmetric to each other with respect to the second imaginary plane, the second drain connection and the fourth drain connection are approximately symmetric to each other with respect to the second imaginary plane.

### Claim 18 (depends on 14)

The dual-sided MOS IC of claim 14, further comprising:
a first signal bus on one of the MOS IC frontside or the MOS IC backside, the first signal bus being coupled to one of the first source connection and the third source connection, or the second source connection and the fourth source connection; and
a second signal bus on an other one of the MOS IC frontside or the MOS IC backside, the second signal bus being coupled to one of the second drain connection and the fourth drain connection, or the first drain connection and the third drain connection.

### Claim 19 (depends on 1)

The dual-sided MOS IC of claim 1, wherein the isolation layer is a buried oxide (BOX) layer.

### Claim 20 (depends on 1)

The dual-sided MOS IC of claim 1, wherein the first front-to-backside connection and the second front-to-backside connection each comprise at least one via.

### Claim 21 (depends on 1)

The dual-sided MOS IC of claim 1, wherein the first source connection is coupled to a first source diffusion region on the MOS IC frontside, the first drain connection is coupled to a first drain diffusion region on the MOS IC frontside, the second drain connection is coupled to a second drain diffusion region on the MOS IC frontside, and the second source connection is coupled to a second source diffusion region on the MOS IC frontside.

### Claim 22 (depends on 21)

The dual-sided MOS IC of claim 21, wherein the first source diffusion region and the first drain diffusion region share a first continuous diffusion region, and the second source diffusion region and the second drain diffusion region share a second continuous diffusion region, where the first continuous diffusion region and the second continuous diffusion region are separate from each other.

### Claim 23 (depends on 1)

The dual-sided MOS IC of claim 1, wherein the first source connection comprises at least a first plurality of metal x (Mx) layer interconnects, the first drain connection comprises at least a second plurality of Mx layer interconnects, the second source connection comprises at least a third plurality of Mx layer interconnects, and the second drain connection comprises at least a fourth plurality of Mx layer interconnects.

### Claim 24 (depends on 23)

The dual-sided MOS IC of claim 23, wherein the first source connection further comprises a first plurality of metal x+y (Mx+y) layer interconnects coupled to the first plurality of Mx layer interconnects, the first drain connection further comprises a second plurality of Mx+y layer interconnects coupled to the second plurality of Mx layer interconnects, the second source connection further comprises a third plurality of Mx+y layer interconnects coupled to the third plurality of Mx layer interconnects, and the second drain connection further comprises a fourth plurality of Mx+y layer interconnects coupled to the fourth plurality of Mx layer interconnects.

### Claim 25 (depends on 1)

The dual-sided MOS IC of claim 1, wherein the MOS gates, the first source connection, the second source connection, the first drain connection, the second drain connection, the first front-to-backside connection, and the second front-to-backside connection have a rotational symmetry.

### Claim 26 (depends on 1)

The dual-sided MOS IC of claim 1, wherein the MOS transistor is configured to be a radio frequency (RF) switch.