# US 12,224,207 B2 · Method of processing a workpiece and system for processing a workpiece > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,224,207 B2 - Document ID: US12224207B2 - Status: Granted - Kind: B2 - Application number: 16/885,526 - Filed: 2020-05-28 - Published: 2020-12-03 - Granted: 2025-02-11 - Earliest claimed: 2019-05-31 - Assignees: Disco Corporation - Applicants: DISCO Corporation - Inventors: Hitoshi Hoshino; Tzanimir Arguirov; Yasuyoshi Yubira; Karl Heinz Priewasser - Web page: https://patentgrep.com/patent/US12224207B2 ## CPC - H10P 54/00: Cutting or separating of wafers, substrates or parts of devices - H10P 34/42: with electromagnetic radiation, e.g. laser annealing (laser cutting H10P54/20) - H10P 72/7402: {Wafer tapes, e.g. grinding or dicing support tapes} - H10W 46/00: Marks applied to devices, e.g. for alignment or identification - H10P 52/00: Grinding, lapping or polishing of wafers, substrates or parts of devices - H10P 72/7416: {used during dicing or grinding} - H10W 46/503: {Located in scribe lines} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract The invention relates to a method of processing a workpiece having a first surface, a second surface opposite the first surface, and a third surface extending between the first and second surfaces. The method comprises forming modified regions inside the workpiece so as to create openings in the workpiece. The openings extend to at least one of the first surface, the second surface and the third surface. The method further comprises, after forming the modified regions inside the workpiece, introducing a liquid medium into at least some of the openings and, after introducing the liquid medium into the at least some of the openings, applying an external stimulus to the liquid medium so as to increase the volume of the medium. Moreover, the invention relates to a workpiece processing system for performing this method. ## Claims ### Claim 1 A method of processing a workpiece having a first surface, a second surface opposite the first surface, and a third surface extending between the first and second surfaces, the method comprising: forming modified regions inside the workpiece so as to create openings in the workpiece, the openings extending from the modified regions through non-modified regions of the workpiece to at least one of the first surface, the second surface and the third surface, the modified regions being formed so as to be arranged entirely inside the workpiece, so that the modified regions do not extend to any one of the first surface, the second surface and the third surface; after forming the modified regions inside the workpiece, introducing a liquid medium into at least some of the openings, wherein the liquid medium is contained by a liquid barrier that surrounds the workpiece; and after introducing the liquid medium into the at least some of the openings, applying an external stimulus to the liquid medium so as to increase the volume of the medium, wherein the workpiece is divided by the step of applying the external stimulus to the liquid medium, without an additional dividing step, and wherein: the workpiece is supported by a sheeting; and the liquid barrier is provided on an upper surface of the sheeting. ### Claim 2 (depends on 1) The method according to claim 1, wherein forming the modified regions inside the workpiece comprises or consists of applying a laser beam to the workpiece. ### Claim 3 (depends on 2) The method according to claim 2, wherein the workpiece is made of a material which is transparent to the laser beam and the laser beam is applied to the workpiece in a condition where a focal point of the laser beam is located inside the workpiece or in a condition where the focal point of the laser beam is located on the first surface, on the second surface or on the third surface. ### Claim 4 The method according to any one of the preceding claims, wherein applying the external stimulus to the liquid medium comprises or consists of heating the liquid medium or cooling the liquid medium. ### Claim 5 (depends on 4) The method according to claim 4, wherein applying the external stimulus to the liquid medium comprises or consists of applying an electric field and/or a magnetic field to the liquid medium. ### Claim 6 (depends on 4) The method according to claim 4, wherein applying the external stimulus to the liquid medium induces a phase transition of the liquid medium so as to increase the volume of the medium. ### Claim 7 (depends on 4) The method according to claim 4, wherein the openings are cracks in the workpiece. ### Claim 8 (depends on 4) The method according to claim 4, wherein the liquid medium is introduced into the at least some of the openings by applying the liquid medium or a vapour of the liquid medium to at least one of the first surface, the second surface and the third surface to which the openings extend so that at least a portion of the liquid medium at least partially enters into the openings. ### Claim 9 (depends on 4) The method according to claim 4, wherein the liquid medium is water. ### Claim 10 (depends on 4) The method according to claim 4, wherein the liquid medium contains a surfactant. ### Claim 11 (depends on 1) The method according to claim 1, wherein the sheeting comprises a tape. ### Claim 12 (depends on 1) The method according to claim 1, wherein the modified regions comprise or are amorphous regions. ### Claim 13 (depends on 1) The method according to claim 1, wherein the modified regions comprise or are regions in which cracks are formed. ### Claim 14 A system for processing a workpiece having a first surface, a second surface opposite the first surface, and a third surface extending between the first and second surfaces, the system comprising: a modified region forming means configured to form modified regions inside the workpiece so as to create openings in the workpiece, the openings extending from the modified regions through non-modified regions of the workpiece to at least one of the first surface, the second surface and the third surface, the modified regions being formed so as to be arranged entirely inside the workpiece, so that the modified regions do not extend to any one of the first surface, the second surface and the third surface; a liquid medium supplying means configured to introduce a liquid medium into at least some of the openings, wherein the liquid medium is contained by a liquid barrier that surrounds the workpiece; and an external stimulus applying means configured to apply an external stimulus to the liquid medium introduced into the at least some of the openings so as to increase the volume of the medium, wherein the workpiece is divided when the external stimulus is applied to the liquid medium, without an additional dividing step, and wherein: the workpiece is supported by a sheeting; and the liquid barrier is provided on an upper surface of the sheeting. ### Claim 15 (depends on 14) The system according to claim 14, wherein the sheeting comprises a tape. ### Claim 16 (depends on 14) The system according to claim 14, wherein the modified regions comprise or are amorphous regions. ### Claim 17 (depends on 14) The system according to claim 14, wherein the modified regions comprise or are regions in which cracks are formed. ### Claim 18 A method of processing a workpiece having a first surface, a second surface opposite the first surface, and a third surface extending between the first and second surfaces, the method comprising: forming a plurality of hole regions in the workpiece, wherein each hole region is composed of a modified region and an opening in the modified region, wherein the modified region surrounds the opening, wherein the opening extends to at least one of the first surface, the second surface and the third surface, and further wherein each modified region comprises or is an amorphous region; after forming the hole regions in the workpiece, introducing a liquid medium into at least some of the openings, wherein the liquid medium is contained by a liquid barrier that surrounds the workpiece; and after introducing the liquid medium into the at least some of the openings, applying an external stimulus to the liquid medium so as to increase the volume of the medium, and wherein: the workpiece is supported by a sheeting; and the liquid barrier is provided on an upper surface of the sheeting. ### Claim 19 A system for processing a workpiece having a first surface, a second surface opposite the first surface, and a third surface extending between the first and second surfaces, the system comprising: a modified region forming means configured to form hole regions in the workpiece, wherein each hole region is composed of a modified region and an opening in the modified region, wherein the modified region surrounds the opening, wherein the opening extends to at least one of the first surface, the second surface and the third surface, and further wherein each modified region comprises or is an amorphous region; a liquid medium supplying means configured to introduce a liquid medium into at least some of the openings, wherein the liquid medium is contained by a liquid barrier that surrounds the workpiece; and an external stimulus applying means configured to apply an external stimulus to the liquid medium introduced into the at least some of the openings so as to increase the volume of the medium, and wherein: the workpiece is supported by a sheeting; and the liquid barrier is provided on an upper surface of the sheeting.