# US 12,224,189 B2 · Substrate type sensor and method of measuring the impact point and the impact force of chemical > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,224,189 B2 - Document ID: US12224189B2 - Status: Granted - Kind: B2 - Application number: 17/564,562 - Filed: 2021-12-29 - Published: 2022-06-30 - Granted: 2025-02-11 - Earliest claimed: 2020-12-31 - Assignees: Semes Co., Ltd. - Applicants: Semes Co., Ltd. - Inventors: Young Seop Choi; Yong-Jun Seo; Sang Hyun Son; Jun Gwon Lee; Hak Hyon Kim; Sun Yong Park - Web page: https://patentgrep.com/patent/US12224189B2 ## CPC - H10P 72/0604: {Process monitoring, e.g. flow or thickness monitoring} - C23C 16/0227: {by cleaning or etching} - C23C 16/45563: {Gas nozzles} - C23C 16/52: Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} - G01L 5/0052: {measuring forces due to impact (G01L5/0061, G01L5/14 take precedence; impact testing of structures G01M7/08; impact testing of material G01N3/00)} - G01L 19/083: {electrical} - G01L 19/086: {for remote indication} - G01L 19/147: {Details about the mounting of the sensor to support or covering means} - H10P 72/0414: {using mainly spraying means, e.g. nozzles} - H10P 72/0606: {Position monitoring, e.g. misposition detection or presence detection} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G) ## Abstract A substrate type sensor includes a substrate shape member, a pressure sensor panel provided at the substrate shape member, the pressure sensor panel including a plurality of pressure sensors, a central module including a transmission unit, the reception unit receiving data from the pressure sensor panel, and a battery proving power to the pressure sensor panel and the central module. ## Claims ### Claim 1 A substrate type sensor comprising: a substrate shape member; a pressure sensor panel provided at the substrate shape member, the pressure sensor panel including a plurality of pressure sensors; a central module including a reception unit, the reception unit being configured to receive data from the pressure sensor panel; and a battery configured to provide power to the pressure sensor panel and the central module; wherein the pressure sensor panel comprises: a front pressure sensor panel provided at a front of the substrate shape member; and a back pressure sensor panel provided at a back of the substrate shape member. ### Claim 2 (depends on 1) The substrate type sensor of claim 1, wherein the substrate shape member has a substantially same physical size as a substrate. ### Claim 3 (depends on 1) The substrate type sensor of claim 1 further comprising: a transmission unit configured to transmit the data received from the reception unit to the outside. ### Claim 4 (depends on 3) The substrate type sensor of claim 3, wherein the transmission unit comprises a wireless communication module. ### Claim 5 (depends on 1) The substrate type sensor of claim 1, wherein the central module and the battery are provided at the front of the substrate shape member. ### Claim 6 (depends on 1) The substrate type sensor of claim 1, wherein the substrate type sensor is provided at an apparatus for treating a substrate with a chemical liquid, and wherein the pressure sensor panel is installed near a location at which the liquid chemical is discharged or at an entirety of the substrate shape member. ### Claim 7 (depends on 1) The substrate type sensor of claim 1, wherein the substrate type sensor is provided at a liquid treating apparatus for treating a substrate with a chemical liquid, and wherein the pressure sensor panel is configured to measure one or more of an impact point and an impact force of the liquid chemical. ### Claim 8 A treating apparatus for treating a substrate with a chemical liquid comprises: a support unit for supporting the substrate; a nozzle for discharging a first liquid chemical to a top surface of the substrate disposed on the support unit; a back nozzle for discharging a second liquid chemical to a bottom surface of the substrate disposed on the support unit; and a substrate type sensor placed at a location where the substrate is to be placed and comprising: a substrate shape member; a pressure sensor panel provided at the substrate shape member, the pressure sensor panel including a plurality of pressure sensors; a central module including a reception unit, the reception unit being configured to receive data from the pressure sensor panel; and a battery configured to provide power to the pressure sensor panel and the central module, wherein the pressure sensor panel comprises: a front pressure sensor panel provided at a front of the substrate shape member, and a back pressure sensor panel provided at a back of the substrate shape member, wherein the front pressure sensor panel is configured to measure one or more of an impact point and an impact force of the first liquid chemical of the nozzle, and wherein the back pressure sensor panel is configured to measure one or more of an impact point and an impact force of the second liquid chemical of the back nozzle. ### Claim 9 A substrate type sensor comprising: a substrate shape member having a substantially same physical size as a substrate; a front pressure sensor panel provided at a front of the substrate shape member, the front pressure sensor panel including a plurality of pressure sensors; a back pressure sensor panel provided at a back of the substrate shape member, the back pressure sensor panel including a plurality of pressure sensors; a central module provided at the front of the substrate shape member, and including a reception unit configured to receive data from the front and back pressure sensor panels and a transmission unit configured to transmit the data received from the reception unit to the outside; and a battery provided at the front of the substrate shape member and configured to provide a power to the front and back pressure sensor panels and the central module.