Electron microscope
AssigneeFocus-Ebeam Technology (Beijing) Co., Ltd.
InventorShuai Li
Life of this patent
Estimating the term…
Abstract
An electron microscope includes: an electron source, which is configured to generate an electron beam; a first beam conduit, which is configured to accelerate the electron beam; a second beam conduit, which is configured to accelerate the electron beam; a first detector, which is disposed between the first beam conduit and the second beam conduit and configured to receive secondary electrons generated by the electron beam acting on a sample to be tested; and a control electrode, which is disposed between the first detector and an optical axis of the electron beam and configured to change the direction of movement of backscattered electrons and the secondary electrons generated by the electron beam acting on said sample.
Claims10
An electron microscope, comprising:
- an electron source, configured to generate an electron beam;
- a first beam guide, configured to accelerate the electron beam;
- a second beam guide, configured to accelerate the electron beam;
- a first detector arranged between the first beam guide and the second beam guide, configured to receive secondary electrons generated by the electron beam acting on a specimen to be tested;
- and
- a control electrode arranged between the first detector and an optical axis of the electron beam, configured to change movement directions of backscattered electrons and the secondary electrons generated by the electron beam acting on the specimen to be tested.
Dependencies are inferred from the claim text.