# US 12,223,250 B2 · Method of manufacturing integrated circuit having through-substrate via

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- Number: US 12,223,250 B2
- Document ID: US12223250B2
- Status: Granted
- Kind: B2
- Application number: 18/350,738
- Filed: 2023-07-11
- Published: 2023-11-02
- Granted: 2025-02-11
- Earliest claimed: 2020-07-09
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Company, Ltd.
- Inventors: Chih-Chia Hu; Ming-Fa Chen; Sen-Bor Jan; Meng-Wei Chiang
- Web page: https://patentgrep.com/patent/US12223250B2

## CPC

- G06F 30/392: Floor-planning or layout, e.g. partitioning or placement
- G06F 30/394: Routing (G06F30/396 takes precedence)
- H10D 89/10: Integrated device layouts
- H10W 20/212: {Top-view shapes or dispositions, e.g. top-view layouts of the vias}
- H10W 20/2134: {TSVs extending from the semiconductor wafer into back-end-of-line layers}
- G06F 2119/06: Power analysis or power optimisation
- H10D 62/116: {adjoining the input or output regions of field-effect devices, e.g. adjoining source or drain regions}
- H10D 84/834: {comprising FinFETs}
- H10W 20/20: Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
- G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N)
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A method includes generating an integrated circuit (IC) layout design and manufacturing an IC based on the IC layout design. Generating the IC layout design includes generating a pattern of a first shallow trench isolation (STI) region and a pattern of a through substrate via (TSV) region within the first STI region; a pattern of a second STI region surrounding the first STI region, the second STI region includes a first and second layout region, the second layout region being separated from the first STI region by the first layout region, first active regions of a group of dummy devices being defined within the first layout region, and second active regions of a group of active devices being defined within the second layout region; and patterns of first gates of the group of dummy devices in the first layout region, each of the first active regions having substantially identical dimension in a first direction.

## Claims

### Claim 1

A method, comprising:
generating an integrated circuit (IC) layout design, comprising:
generating a pattern of a through-substrate via (TSV) region in a keep-out-zone (KOZ);
generating a pattern of first channel regions of first transistors in a layout region surrounding the KOZ;
generating a pattern of second channel regions of second transistors in the KOZ, wherein the first channel regions of the first transistors and the second channel regions of the second transistors are spaced apart from the TSV region, and the second channel regions of the second transistors are substantially identical in channel width; and
manufacturing an IC based on the IC layout design.

### Claim 2 (depends on 1)

The method according to claim 1, wherein generating the IC layout design further comprises:
generating gate patterns over the first channel regions of the first transistors and the second channel regions of the second transistors.

### Claim 3 (depends on 1)

The method according to claim 1, wherein the TSV region is spaced apart from a nearest second channel region of the second transistors by a distance ranging from about 0.01 μm to about 500 μm.

### Claim 4 (depends on 1)

The method according to claim 1, wherein the TSV region is spaced apart from a nearest first channel region of the first transistors by a distance ranging from about 0.8 μm to about 100 μm.

### Claim 5 (depends on 1)

The method according to claim 1, wherein a channel width of the second channel regions is smaller than a channel width of the first channel regions.

### Claim 6 (depends on 1)

The method according to claim 1, wherein shapes and sizes of the second channel regions are substantially identical to shapes and sizes of the first channel regions.

### Claim 7 (depends on 1)

The method according to claim 1, wherein at least two of the second channel regions are different in channel length.

### Claim 8 (depends on 1)

The method according to claim 1, wherein the first transistors are spaced apart from the TSV region by the KOZ.

### Claim 9

A method, comprising:
generating an integrated circuit (IC) layout design, comprising:
generating a pattern of a through-substrate via (TSV) region;
generating a pattern of first channel regions of first transistors around the pattern of the TSV region, wherein the first transistors are separated from the TSV region by a keep-out-zone (KOZ);
generating a pattern of second channel regions of second transistors in the KOZ;
defining a separation region located between the TSV region, the first channel regions of the first transistors and the second channel regions of the second transistors as an isolation region;
wherein the second channel regions of the second transistors are substantially identical in channel width, and
manufacturing an IC based on the IC layout design.

### Claim 10 (depends on 9)

The method according to claim 9, wherein generating the IC layout design further comprises:
generating gate patterns over the isolation region, the first channel regions of the first transistors and the second channel regions of the second transistors.

### Claim 11 (depends on 9)

The method according to claim 9, wherein the pattern of second channel regions of the second transistors is separated from the TSV region by an excluded region of the isolation region.

### Claim 12 (depends on 9)

The method according to claim 9, wherein the TSV region is spaced apart from the nearest first transistor by a distance ranging from about 0.8 μm to about 100 μm.

### Claim 13 (depends on 9)

The method according to claim 9, wherein a channel width of the second channel regions is smaller than a channel width of the first channel regions.

### Claim 14 (depends on 9)

The method according to claim 9, wherein shapes and sizes of the second channel regions are substantially identical to shapes and sizes of the first channel regions.

### Claim 15 (depends on 9)

The method according to claim 9, wherein at least two of the second channel regions are different in channel length.

### Claim 16

A method, comprising:
generating an integrated circuit (IC) layout design, comprising:
generating a pattern of a through-substrate via (TSV) region in a keep-out-zone (KOZ);
generating a pattern of active channel regions of active transistors in a layout region surrounding the KOZ;
generating a pattern of dummy channel regions of dummy transistors in the KOZ, wherein the pattern of dummy channel regions of the dummy transistors is separated from the TSV region by an excluded region of the isolation region, and the second channel regions of the second transistors are substantially identical in channel width; and
manufacturing an IC based on the IC layout design.

### Claim 17 (depends on 16)

The method according to claim 16, wherein generating the IC layout design further comprises:
generating gate patterns over the active channel regions of the active transistors and the dummy channel regions of the dummy transistors.

### Claim 18 (depends on 16)

The method according to claim 16, wherein a channel width of the dummy channel regions is smaller than a channel width of the active channel regions.

### Claim 19 (depends on 16)

The method according to claim 16, wherein shapes and sizes of the dummy channel regions are substantially identical to shapes and sizes of the active channel regions.

### Claim 20 (depends on 16)

The method according to claim 16, wherein at least two of the dummy channel regions are different in channel length.