# US 12,222,659 B2 · Metrology system for packaging applications > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,222,659 B2 - Document ID: US12222659B2 - Status: Granted - Kind: B2 - Application number: 18/098,482 - Filed: 2023-01-18 - Published: 2024-07-18 - Granted: 2025-02-11 - Earliest claimed: 2023-01-18 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Venkatakaushik Voleti; Mehdi Vaez-Iravani - Web page: https://patentgrep.com/patent/US12222659B2 ## CPC - G03F 9/7088: {Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection} - G03F 7/70775: {Position control, e.g. interferometers or encoders for determining the stage position} - G03F 9/7069: {Alignment mark illumination, e.g. darkfield, dual focus} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract Methods and apparatus for detecting metrology data are provided herein. For example, an apparatus comprises a substrate support configured to support a substrate and another substrate disposed on the substrate, an incoherent light source configured to transmit an illumination beam through the substrate and the another substrate, a set of optics configured to direct the illumination beam when transmitted through the substrate and the another substrate, an actuator operably coupled to the substrate support and configured to move the substrate and another substrate back and forth in a scanning pattern, and a sensor operably coupled to the actuator, synchronized therewith, and configured to receive the illumination beam from the set of optics to obtain subsurface images of the substrate and the another substrate. ## Claims ### Claim 1 An apparatus for detecting metrology data, comprising: a substrate support configured to support a substrate and another substrate disposed on the substrate; an incoherent light source configured to transmit an illumination beam through the substrate and the another substrate; a set of optics configured to direct the illumination beam when transmitted through the substrate and the another substrate; an actuator operably coupled to the substrate support and configured to move the substrate and another substrate back and forth in a scanning pattern; and a sensor having a read-out rate, the sensor operably coupled to the actuator, the movement of the actuator synchronized with the read-out rate, the sensor configured to receive the illumination beam from the set of optics to obtain subsurface images of the substrate and the another substrate. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the another substrate is at least one of a coupon, wafer, or die. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein the incoherent light source is an LED that is configured to generate light in a short wave infrared (SWIR) wavelength range. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein the set of optics comprises at least one of a high-magnification microscope, an autofocus lens, a single resolution lens, or a tube lens. ### Claim 5 (depends on 4) The apparatus of claim 4, wherein the autofocus lens comprises an electrically tunable or acousto-optically modulated lens configured to focus at multiple depths through the substrate and the another substrate. ### Claim 6 (depends on 1) The apparatus of claim 1, wherein the set of optics is configured to provide magnifications from about 10× to about 100×. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein the sensor is a multi-stage SWIR time-delay integration (TDI) sensor. ### Claim 8 (depends on 1) The apparatus of claim 1, wherein the actuator is configured to move the substrate and another substrate in a x-direction and a y-direction forming a relatively serpentine pattern. ### Claim 9 (depends on 1) The apparatus of claim 1, wherein the incoherent light source and the actuator are disposed in the substrate support. ### Claim 10 (depends on 9) The apparatus of claim 9, further comprising a transparent surface disposed on the substrate support and movable relative thereto, wherein the incoherent light source is positioned beneath the transparent surface and configured to deliver the illumination beam from a bottom-side of the substrate. ### Claim 11 (depends on 1) The apparatus of claim 1, wherein the incoherent light source is disposed between the set of optics and the sensor to deliver light directly to a top-side of the substrate and the another substrate. ### Claim 12 (depends on 11) The apparatus of claim 11, further comprising at least one of beam splitters, reflectors, or polarizers. ### Claim 13 (depends on 1) The apparatus of claim 1, wherein the movement of the actuator is synchronized with the read-out rate so that when the substrate support is moved by the actuator, a specific area of the substrate and the another substrate are exposed multiple times by the sensor, and wherein each exposure is averaged. ### Claim 14 A method for packaging applications, comprising: supporting a substrate and another substrate disposed on the substrate on a substrate support, the substrate support operably coupled to an actuator configured to move the substrate and the another substrate back and forth in a scanning pattern; transmitting an illumination beam through the substrate and the another substrate; directing the illumination beam when transmitted through the substrate and the another substrate; moving the substrate and another substrate back and forth in a scanning pattern using the actuator; and receiving, at a sensor, the illumination beam to obtain subsurface images of the substrate and the another substrate, the sensor having a read-out rate, the sensor operably coupled to the actuator, the movement of the actuator synchronized with the read-out rate. ### Claim 15 (depends on 14) The method of claim 14, wherein the another substrate is at least one of a coupon, wafer, or die. ### Claim 16 (depends on 14) The method of claim 14, wherein transmitting the illumination beam is performed using an LED that is configured to generate light in a short wave infrared (SWIR) wavelength range. ### Claim 17 (depends on 14) The method of claim 14, wherein directing the illumination beam is performed using a set of optics comprising at least one of a high-magnification microscope, an autofocus lens, a single resolution lens, or a tube lens. ### Claim 18 (depends on 17) The method of claim 17, wherein the autofocus lens comprises an electrically tunable or acousto-optically modulated lens configured to focus at multiple depths through the substrate and the another substrate. ### Claim 19 (depends on 17) The method of claim 17, wherein the set of optics is configured to provide magnifications from about 10× to about 100×. ### Claim 20 (depends on 14) The method of claim 14, wherein receiving the illumination beam is performed using a multi-stage SWIR time-delay integration (TDI) sensor. ### Claim 21 A non-transitory computer readable storage medium have instructions stored thereon that when executed by a processor perform a method for packaging applications, comprising: supporting a substrate and another substrate disposed on the substrate on a substrate support, the substrate support operably coupled to an actuator configured to move the substrate and the another substrate back and forth in a scanning pattern; transmitting an illumination beam through the substrate and the another substrate; directing the illumination beam when transmitted through the substrate and the another substrate; moving the substrate and another substrate back and forth in a scanning pattern using the actuator; and receiving, at a sensor, the illumination beam to obtain subsurface images of the substrate and the another substrate, the sensor having a read-out rate, the sensor operably coupled to the actuator, the movement of the actuator synchronized with the read-out rate.