# US 12,222,646 B2 · Polypeptide, photoresist composition including the same, and method of forming pattern using the same

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- Number: US 12,222,646 B2
- Document ID: US12222646B2
- Status: Granted
- Kind: B2
- Application number: 17/741,692
- Filed: 2022-05-11
- Published: 2023-06-08
- Granted: 2025-02-11
- Earliest claimed: 2021-12-02
- Assignees: Samsung Electronics Co., Ltd.
- Applicants: Samsung Electronics Co., Ltd.
- Inventors: Jinha Kim; Soonchun Chung; Jieun Kim; Joonsong Park
- Web page: https://patentgrep.com/patent/US12222646B2

## CPC

- G03F 7/0387: {Polyamides or polyimides}
- H05K 3/064: {Photoresists}
- C07K 14/001: {by chemical synthesis}
- G03F 7/039: Macromolecular compounds which are photodegradable, e.g. positive electron resists (G03F7/075 takes precedence; macromolecular quinonediazides G03F7/023)
- G03F 7/2014: {Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame}
- G03F 7/32: Liquid compositions therefor, e.g. developers
- G03F 7/2006: {using coherent light; using polarised light}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- C07K: PEPTIDES (peptides in foodstuffs A23; obtaining protein compositions for foodstuffs, working-up proteins for foodstuffs A23J; preparations for medicinal purposes A61K; peptides containing beta-lactam rings C07D; cyclic dipeptides not having in their molecule any other peptide link than those which form their ring, e.g. piperazine-2,5-diones, C07D; ergot alkaloids of the cyclic peptide type C07D519/02; macromolecular compounds having statistically distributed amino acid units in their molecules, i.e. when the preparation does not provide for a specific; but for a random sequence of the amino acid units, homopolyamides and block copolyamides derived from amino acids C08G69/00; macromolecular products derived from proteins C08H1/00; preparation of glue or gelatine C09H; single cell proteins, enzymes C12N; genetic engineering processes for obtaining peptides C12N15/00; compositions for measuring or testing processes involving enzymes C12Q; investigation or analysis of biological material G01N33/00)

## Abstract

A polypeptide, a photoresist composition including the polypeptide, and a method of forming patterns by using the photoresist composition.

## Claims

### Claim 1

A polypeptide comprising a region A, a region B, and a region H;
wherein:
the region A has an alanine content of 20% or more, and includes at least one first repeat unit having 4 to 6 consecutive amino acid residues, wherein the first repeat unit is represented by Formula 1:
X11-(Ala-X12)n11—X13; Formula 1
wherein X11 and X12 are each independently Gly or Ala,
X13 is Ser, and
n11 is 1 or 2;
the region B has a tyrosine content of 10% or more, a content of 5% or more of at least one of serine, threonine, asparagine, or glutamine, and includes at least one second repeat unit including 4 to 8 consecutive amino acid residues, wherein the second repeat unit is represented by Formula 2:
X21—(X22—X23)n21—(X24—X25)n22-Tyr; Formula 2
wherein X21 and X23 are each Gly,
X22 and X24 are each independently Ala or Val,
X25 is Ser, Thr, Asn, or Gln,
n21 is an integer of 0 to 2, and
n22 is 1; and
the region H comprises Gly-Ala-Ala-Ser (SEQ ID NO: 8);
wherein the polypeptide has a molecular weight of 10,000 g/mol or less.

### Claim 2 (depends on 1)

The polypeptide of claim 1, wherein the first repeat unit is Gly-Ala-Gly-Ala-Gly-Ser (SEQ ID NO: 1) or Gly-Ala-Ala-Ser (SEQ ID NO: 2); and
the second repeat unit is Gly-Ala-Ser-Tyr (SEQ ID NO: 3), Gly-Ala-Gly-Ala-Ser-Tyr (SEQ ID NO: 4), Gly-Ala-Gly-Val-Gly-Ala-Ser-Tyr (SEQ ID NO: 5), or Gly-Ala-Gly-Ala-Gly-Ala-Ser-Tyr (SEQ ID NO: 6).

### Claim 3 (depends on 1)

The polypeptide of claim 1, wherein the region A includes 1 to 4 of the first repeat units, and the region B includes 2 to 12 of the second repeat units.

### Claim 4 (depends on 1)

The polypeptide of claim 1, wherein the ratio of the number of the first repeat unit to the number of the second repeat unit is about 1:1 to about 1:x, and wherein x is any real number greater than 1.

### Claim 5 (depends on 1)

The polypeptide of claim 1, wherein the region H is represented by Formula 3:
X31-(Ala-X32)n31—X33-Gly-Ala-Ala-Ser (SEQ ID NO: 15); Formula 3
wherein in Formula 3, X31 and X32 are each independently Gly or Ala; X33 is Ser or Ala; and n31 is 1 or 2.

### Claim 6 (depends on 1)

The polypeptide of claim 1, wherein the region H is Gly-Ala-Gly-Ala-Gly-Ser-Gly-Ala-Ala-Ser (SEQ ID NO: 7).