# US 12,222,548 B2 · Optical waveguide coupling using fabricated waveguide coupling structures > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,222,548 B2 - Document ID: US12222548B2 - Status: Granted - Kind: B2 - Application number: 18/308,192 - Filed: 2023-04-27 - Published: 2023-08-24 - Granted: 2025-02-11 - Earliest claimed: 2021-11-29 - Assignees: Ciena Corporation - Applicants: Ciena Corporation - Inventors: Kelvin Prosyk; Ronald Richard Millett - Web page: https://patentgrep.com/patent/US12222548B2 ## CPC - G02B 6/26: Optical coupling means (G02B6/36, G02B6/42 take precedence) - G02B 6/2813: {based on multimode interference effect, i.e. self-imaging} - G02B 6/02: Optical fibres with cladding {with or without a coating} - G02B 6/136: by etching - G02B 6/14: Mode converters - H01S 5/026: Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers (stabilisation of output H01S5/06) - H01S 5/22: having a ridge or stripe structure - H01S 5/2081: {using special etching techniques} - H01S 5/50: Amplifier structures not provided for in groups H01S5/02 - H01S5/30 - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL ## Abstract First and second waveguide structures are coupled to a waveguide coupling structure, the first waveguide structure comprising a first guiding core structure formed on a first cladding structure, and a second cladding structure formed on the first guiding core structure. The first and second waveguide structures have respective guiding ridges. The second waveguide structure comprises a second guiding core structure formed on a third cladding structure, and a fourth cladding structure formed on the second guiding core structure. The waveguide coupling structure comprises a transition structure, a multimode interference structure between the transition structure and the second waveguide structure, and an electrode over at least a portion of the guiding ridge within the second cladding structure and over at least a portion of the transition structure. ## Claims ### Claim 1 An article of manufacture, comprising: a first waveguide structure supporting a first optical mode coupled to a waveguide coupling structure, the first waveguide structure comprising a first guiding core structure formed on a first cladding structure, and a second cladding structure formed on the first guiding core structure, where the first waveguide structure has a guiding ridge of a first width; a second waveguide structure supporting a second optical mode coupled to the waveguide coupling structure, the second waveguide structure comprising a second guiding core structure formed on a third cladding structure, and a fourth cladding structure formed on the second guiding core structure, where the second waveguide structure has a guiding ridge of a second width; where the waveguide coupling structure comprises a transition structure having a third width larger than the first width and larger than the second width, a multimode interference structure between the transition structure and the second waveguide structure having a width larger than the first width and smaller than the third width, and an electrode covering at least a portion of the transition structure and at least a portion of the first waveguide structure and not covering any portion of the multimode interference structure. ### Claim 2 (depends on 1) The article of manufacture of claim 1, where the guiding ridge of the first waveguide structure has a first depth relative to a top plane that is above a radius of the first optical mode; the guiding ridge of the second waveguide structure has a second depth relative to the top plane that is larger than the first depth; and the multimode interference structure has a height substantially equal to the second depth. ### Claim 3 (depends on 2) The article of manufacture of claim 2, where the first depth of the guiding ridge of the first waveguide structure extends to a plane within the second cladding structure. ### Claim 4 (depends on 3) The article of manufacture of claim 3, where the second depth of the guiding ridge of the second waveguide structure extends through the fourth cladding structure to a plane within the third cladding structure. ### Claim 5 (depends on 2) The article of manufacture of claim 2, where the first waveguide structure, the second waveguide structure, the multimode interference structure, and the transition structure all have a top surface at the top plane. ### Claim 6 (depends on 1) The article of manufacture of claim 1, where the first waveguide structure is characterized by a first effective lateral index contrast associated with the first optical mode, and the second waveguide structure is characterized by a second effective lateral index contrast associated with the second optical mode that is larger than the first effective lateral index contrast. ### Claim 7 (depends on 6) The article of manufacture of claim 6, where the guiding ridge of the second waveguide structure is more deeply etched than the guiding ridge of the first waveguide structure. ### Claim 8 (depends on 6) The article of manufacture of claim 6, where the first waveguide structure comprises a buried heterostructure waveguide. ### Claim 9 (depends on 1) The article of manufacture of claim 1, where the first guiding core structure is formed from a layer of a first material that ends at a butt joint, and the second guiding core structure is formed from a layer of a second material that ends at the butt joint. ### Claim 10 (depends on 9) The article of manufacture of claim 9, where the butt joint is within the transition structure. ### Claim 11 (depends on 1) The article of manufacture of claim 1, where the first guiding core structure is configured to provide optical gain in the presence of an electric current generated in response to a voltage applied to the electrode. ### Claim 12 (depends on 11) The article of manufacture of claim 11, where the first guiding core structure is formed from a layer of a first material that extends into the transition structure and ends at a butt joint, and the second guiding core structure is formed from a layer of a second material that extends into the multimode interference structure and into the transition structure and ends at the butt joint. ### Claim 13 (depends on 12) The article of manufacture of claim 12, where the electrode has an edge that is substantially contained in a plane within the transition structure that contains the butt joint. ### Claim 14 (depends on 13) The article of manufacture of claim 13, where the butt joint is tilted with respect to a propagation axis of the first optical mode so that the plane within the transition region that contains the butt joint is not perpendicular to the propagation axis. ### Claim 15 (depends on 1) The article of manufacture of claim 1, where the electrode covers at least a portion of the guiding ridge within the second cladding structure. ### Claim 16 (depends on 15) The article of manufacture of claim 15, where the portion of the electrode that covers at least a portion of the transition structure has a width larger than a width of the portion of the electrode that covers at least a portion of the guiding ridge within the second cladding structure. ### Claim 17 (depends on 1) The article of manufacture of claim 1, where the first waveguide structure includes a first aperture notch on a first side of the first waveguide structure and a second aperture notch on a second side of the first waveguide structure, where each of the first and second aperture notches is etched through a portion of the first guiding core structure to provide a narrower aperture in proximity to the transition structure. ### Claim 18 A method for fabricating an integrated optical coupler, the method comprising: forming a first waveguide structure supporting a first optical mode coupled to a waveguide coupling structure, the first waveguide structure comprising a first guiding core structure formed on a first cladding structure, and a second cladding structure formed on the first guiding core structure, where the first waveguide structure has a guiding ridge of a first width; and forming a second waveguide structure supporting a second optical mode coupled to the waveguide coupling structure, the second waveguide structure comprising a second guiding core structure formed on a third cladding structure, and a fourth cladding structure formed on the second guiding core structure, where the second waveguide structure has a guiding ridge of a second width; where the waveguide coupling structure comprises a transition structure having a third width larger than the first width and larger than the second width, a multimode interference structure between the transition structure and the second waveguide structure having a width larger than the first width and smaller than the third width, and an electrode covering at least a portion of the transition structure and at least a portion of the first waveguide structure and not covering any portion of the multimode interference structure.