# US 12,222,370 B2 · Probe head and probe card having same

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- Number: US 12,222,370 B2
- Document ID: US12222370B2
- Status: Granted
- Kind: B2
- Application number: 17/919,739
- Filed: 2021-04-20
- Published: 2023-05-11
- Granted: 2025-02-11
- Earliest claimed: 2020-04-22
- Assignees: Point Engineering Co., Ltd.
- Applicants: Point Engineering Co., Ltd.
- Inventors: Bum Mo Ahn; Seung Ho Park; Sung Hyun Byun
- Web page: https://patentgrep.com/patent/US12222370B2

## CPC

- G01R 1/07371: {using an intermediate card or back card with apertures through which the probes pass}
- G01R 1/06755: {Material aspects}
- G01R 1/07342: {the body of the probe being at an angle other than perpendicular to test object, e.g. probe card}
- G01R 1/07378: {using an intermediate adapter, e.g. space transformers (G01R1/07371 takes precedence)}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

A probe head and a probe card having the same are provided. The probe head includes a plurality of guide plates each having a guide hole, wherein each of the guide plates has a shape in which a plurality of layers are stacked, and each of the guide plates includes: a first guide layer provided at a lowermost side thereof, and having a first guide hole; and a second guide layer provided at an uppermost side thereof, and having a second guide hole, wherein a side wall of the first guide hole and a side wall of the second guide hole are not provided on the same vertical line.

## Claims

### Claim 1

A probe head of a probe card, the probe head comprising:
a plurality of guide plates each having a guide hole,
wherein at least one of the guide plates has a shape in which a plurality of guide layers are stacked, and
at least one of the guide plates comprises:
a first guide layer provided at a lowermost side thereof, and having a first guide hole; and
a second guide layer provided at an uppermost side thereof, and having a second guide hole,
wherein a side wall of the first guide hole and a side wall of the second guide hole are not provided on a same vertical line,
wherein the first guide layer and the second guide layer are made of an anodic aluminum oxide film formed by anodizing a metal as a base material and removing the base material,
wherein the plurality of the guide plates comprises: a lower guide plate having a lower guide hole; and an upper guide plate provided above the lower guide plate, and having an upper guide hole,
wherein one of the upper guide plate and the lower guide plate includes the first guide layer and the second guide layer, and
wherein the upper guide hole and the lower guide hole have a symmetrical structure.

### Claim 2 (depends on 1)

The probe head of claim 1, wherein a center of the first guide hole and a center of the second guide hole are provided on a same vertical line.

### Claim 3 (depends on 2)

The probe head of claim 2, wherein the first guide hole has a larger size than the second guide hole.

### Claim 4 (depends on 2)

The probe head of claim 2, wherein the first guide hole has a smaller size than the second guide hole.

### Claim 5

A probe card, comprising:
a space transformer having a probe connection pad electrically connected to each of a plurality of probes; and
a probe head provided below the space transformer, and having a plurality of guide plates having a shape in which a plurality of guide layers are stacked,
wherein at least one of the guide plates comprises:
a first guide layer provided at a lowermost side thereof, and having a first guide hole; and
a second guide layer provided at an uppermost side thereof, and having a second guide hole,
wherein a side wall of the first guide hole and a side wall of the second guide hole are not provided on a same vertical line,
wherein the first guide layer and the second guide layer are made of an anodic aluminum oxide film formed by anodizing a metal as a base material,
wherein the plurality of the guide plates comprises: a lower guide plate having a lower guide hole; and an upper guide plate provided above the lower guide plate, and having an upper guide hole,
wherein one of the upper guide plate and the lower guide plate includes the first guide layer and the second guide layer, and
wherein the upper guide hole and the lower guide hole have a symmetrical structure.