# US 12,222,346 B2 · Stable nanopores and nanopore arrays for ionic and other measurements > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,222,346 B2 - Document ID: US12222346B2 - Status: Granted - Kind: B2 - Application number: 17/218,365 - Filed: 2021-03-31 - Published: 2021-10-14 - Granted: 2025-02-11 - Earliest claimed: 2020-04-01 - Assignees: The Trustees of the University of Pennsylvania - Applicants: The Trustees of the University of Pennsylvania - Inventors: Marija Drndic; Yung-Chien Chou - Web page: https://patentgrep.com/patent/US12222346B2 ## CPC - G01N 33/48721: {Investigating individual macromolecules, e.g. by translocation through nanopores (Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68)} - B81C 1/00087: {Holes} - G01N 27/44791: {Microapparatus (sample containers with integrated microfluidic structures B01L3/5027)} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01) ## Abstract Provided are nanopore devices that include a hafnium oxide coating on the pores of the devices. Such devices exhibit improved stability, especially when in a salt solution environment. Also provided are related methods. ## Claims ### Claim 1 An etch-resistant nanopore component, comprising: a first membrane, the membrane having a pore extending therethrough, the pore having an inner wall defined by the membrane; and a coating of hafnium oxide conforming to and surmounting at least a portion of the inner wall, and the pore having, inclusive of the coating of hafnium oxide, a narrowest cross-sectional dimension of from about 1 nm to about 100 nm. ### Claim 2 (depends on 1) The component of claim 1, wherein the membrane comprises silicon nitride. ### Claim 3 (depends on 1) The component of claim 1, wherein the coating of hafnium oxide defines a thickness, at a location along the coating, in the range of from about 0.1 nm to about 2 nm. ### Claim 4 (depends on 1) The component of claim 1, wherein the pore is characterized as an hourglass in configuration. ### Claim 5 (depends on 1) The component of claim 1, wherein the pore is characterized as essentially cylindrical in configuration. ### Claim 6 (depends on 1) The component of claim 1, wherein the membrane comprises a thinned region through which the pore extends. ### Claim 7 (depends on 1) The component of claim 1, wherein the membrane comprises a plurality of pores extended therethrough, each of the plurality of pores defining an edge and an inner wall, and each of the edges and inner walls being surmounted by the coating of hafnium oxide. ### Claim 8 (depends on 1) The component of claim 1, wherein the membrane defines a thickness of from about 1 nm to about 100 nm. ### Claim 9 (depends on 1) The component of claim 1, wherein the narrowest cross-sectional dimension of the pore remains essentially constant upon exposure to 1 M KCl for about 6 hours. ### Claim 10 (depends on 1) The component of claim 1, wherein the membrane is supported by a silicon oxide layer. ### Claim 11 (depends on 1) A method, comprising: translocating a macromolecule through the pore of a component according to claim 1. ### Claim 12 (depends on 11) The method of claim 11, further comprising applying a gradient to effect the translocation. ### Claim 13 (depends on 11) The method of claim 11, further comprising collecting one or more signals evolved during the translocating. ### Claim 14 (depends on 13) The method of claim 13, further comprising correlating the one or more signals to one or more structural characteristics of the macromolecule. ### Claim 15 (depends on 11) The method of claim 11, wherein the macromolecule is an oligonucleotide or a polynucleotide. ### Claim 16 (depends on 1) The component of claim 1, further comprising: a second membrane defining a thickness, the second membrane having a pore extending there through, the pore of the second membrane defining an edge and defining an inner wall, and the first membrane and the second membrane being arranged such a line can be drawn so as to extend through the thickness of the first membrane and the thickness of the second membrane. ### Claim 17 (depends on 16) The component of claim 16, wherein the second membrane comprises a thinned region through which the pore of the second membrane extends. ### Claim 18 (depends on 16) The component of claim 16, wherein the pore of the first membrane is at least partially in register with the pore of the second membrane. ### Claim 19 (depends on 16) The component of claim 16, wherein the first membrane defines a plurality of pores formed therein. ### Claim 20 (depends on 19) The component of claim 19, wherein at least one pore of the first membrane is at least partially in register with the pore of the second membrane. ### Claim 21 (depends on 16) The component of claim 16, further comprising a coating of hafnium oxide surmounting at least a portion of the edge and the inner wall of the pore of the second membrane. ### Claim 22 A method, comprising: forming a pore extending through a membrane, the pore having an edge and having an inner wall defined by the membrane; and applying a hafnium oxide coating so as to conform to and surmount at least a portion of the inner wall, the pore having, inclusive of the coating of hafnium oxide, a narrowest cross-sectional dimension of from about 1 nm to about 100 nm. ### Claim 23 (depends on 22) The method of claim 22, further comprising forming a thinned region in the membrane and forming the pore such that the pore extends through the thinned region of the membrane.