Methods for making electrodes and providing electrical connections in sensors
AssigneeCorning Incorporated
InventorsShrisudersan Jayaraman, Navaneetha Krishnan Subbaiyan
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Abstract
A method of forming a sensor, such as a glass electrochemical sensor, is described. In some examples, the method may include forming a plurality of apertures in a glass substrate; forming a sensor body comprising the glass substrate and at least one glass sensor component, wherein one or more apertures of the glass substrate are aligned with the at least one glass sensor component to form an outer contact aperture; filling the outer contact aperture in the sensor body with a first conducting material to form an outer contact through glass via (TGV); and forming an electrode on the glass substrate adjacent at least one of the apertures of the plurality of apertures.
Claims14
A glass electrochemical sensor, comprising:
- a glass sensor body comprising a plurality of through glass vias (TGVs), wherein outer contact apertures of two or more glass sensor components forming the glass sensor body are configured to be aligned when empty to form two or more of the plurality of TGVs, a plurality of outer contact TGVs of the glass sensor body comprising the outer contact apertures at least partially filled with a conducting material;
- and
- at least two electrodes disposed within a continuous cavity formed by the two or more glass sensor components, the cavity disposed within the glass sensor body, each of the at least two electrodes disposed on a surface of the glass sensor body adjacent to at least a different one of the plurality of outer contact TGVs;
- wherein the plurality of TGVs further comprises an access hole in the glass sensor body configured to allow access to the at least two electrodes via the cavity;
- and
- wherein the at least two electrodes are disposed on the surface of the glass sensor body by bottom up plating.
An electronic device comprising a glass electrochemical sensor, the glass electrochemical sensor comprising:
- a glass sensor body comprising a plurality of through glass vias (TGVs), wherein outer contact apertures of two or more glass sensor components forming the glass sensor body are configured to be aligned when empty to form two or more of the plurality of TGVs, a plurality of outer contact TGVs of the glass sensor body comprising the outer contact apertures at least partially filled with a conducting material;
- and
- at least two electrodes disposed within a continuous cavity formed by the two or more glass sensor components, the cavity disposed within the glass sensor body, each of the at least two electrodes disposed on a surface of the glass sensor body adjacent to at least a different one of the plurality of outer contact TGVs;
- wherein the plurality of TGVs further comprises an access hole in the glass sensor body configured to allow access to the at least two electrodes via the cavity;
- wherein the at least two electrodes are disposed on the surface of the glass sensor body by bottom up plating;
- and
- wherein the two or more glass sensor components comprise a glass substrate that comprises the plurality of outer contact TGVs and electrode vias.
A glass electrochemical sensor, comprising:
- a glass sensor body comprising a plurality of through glass vias (TGVs) and a cavity, wherein outer contact apertures of two or more glass sensor components forming the glass sensor body are configured to be aligned when empty to form two or more of the plurality of TGVs, a plurality of outer contact TGVs of the glass sensor body comprising the outer contact apertures at least partially filled with a conducting material, the conducting material that extends along an external outer surface of the glass sensor body;
- and
- at least two electrodes disposed within electrode apertures formed between the external outer surface of the glass sensor body, each electrode aperture adjacent to a different one of the outer contact apertures, each of the at least two electrodes having a first composition throughout a first portion of a corresponding electrode aperture and a second composition throughout a second portion of the corresponding electrode aperture;
- wherein the plurality of TGVs further comprises an access hole in the glass sensor body configured to allow access to the at least two electrodes via the cavity.
Dependencies are inferred from the claim text.