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US 12,222,307 B2Granted
Polymer material, sensor element, and gas measurement device
AssigneeTDK Corporation
InventorsYukiko Moriizumi, Raitaro Masaoka
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Abstract
A polymer material is contained in a sensing film of a sensor element having a quartz plate, an electrode made of a metal film provided on the quartz plate, and a sensing film provided on the electrode, and has a structural unit that contains one or more ethylene unsaturated bonds and is originated from a compound containing one or more functional groups reactive to a gas.
Claims9
A polymer material contained in a sensing film of a sensor element having a quartz plate, an electrode made of a metal film provided on the quartz plate, and a sensing film provided on the electrode, wherein
- the polymer material has a structural unit that contains one or more ethylene unsaturated bonds and is originated from a compound containing one or more functional groups reactive to a gas.
Dependencies are inferred from the claim text.