# US 12,222,159 B2 · Apparatus and method for treating substrate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,222,159 B2 - Document ID: US12222159B2 - Status: Granted - Kind: B2 - Application number: 17/408,953 - Filed: 2021-08-23 - Published: 2022-03-24 - Granted: 2025-02-11 - Earliest claimed: 2020-09-18 - Assignees: Semes Co., Ltd. - Applicants: Semes Co., Ltd. - Inventors: Do Hyeon Yoon; Yong Hyun Choi; Eui Sang Lim; Jun Young Choi - Web page: https://patentgrep.com/patent/US12222159B2 ## CPC - F26B 21/40: using gases other than air - F26B 5/005: {by dipping them into or mixing them with a chemical liquid, e.g. organic; chemical, e.g. organic, dewatering aids (F26B3/005 takes precedence; using chemical vapours or gases F26B21/40)} - F26B 5/14: by applying pressure, e.g. wringing; by brushing; by wiping - F26B 21/35: Temperature; Pressure - F26B: DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM (drying devices for combines A01D41/133; racks for drying fruit or vegetables A01F25/12; drying foodstuffs A23; drying hair A45D20/00; body-drying implements A47K10/00; drying household articles A47L; drying gases or vapours B01D; chemical or physical processes for dewatering or like separating liquids from solids B01D43/00; centrifugal apparatus B04; drying ceramics C04B33/30; drying yarns or fabrics in association with some other form of treatment D06C; drying frames for laundry without heating or positive air circulation, domestic laundry-or spin-driers, wringing or hot pressing laundry D06F; furnaces, kilns, ovens F27) ## Abstract An apparatus for treating a substrate includes a body having an inner space in which the substrate is dried by a drying fluid in a supercritical state, a fluid supply unit that supplies the drying fluid into the inner space, a fluid exhaust unit that releases the drying fluid from the inner space, and a controller. The controller controls the fluid supply unit and the fluid exhaust unit to perform a pressure-raising step of raising pressure in the inner space to a set pressure and a flow step of generating a flow of the drying gas in the inner space by releasing, by the fluid exhaust unit, the drying fluid from the inner space while the fluid supply unit supplies the drying fluid into the inner space. ## Claims ### Claim 1 An apparatus for treating a substrate, the apparatus comprising: a body having an inner space in which the substrate is dried by a drying fluid in a supercritical state; a fluid supply unit configured to supply the drying fluid into the inner space; a fluid exhaust unit configured to release the drying fluid from the inner space and including: a main exhaust line connected with the body; a plurality of branch lines connected to the main exhaust line, wherein the plurality of branch lines includes a flow line; a controller configured to control the fluid supply unit and the fluid exhaust unit to perform: a pressure-raising step of raising pressure in the inner space to a set pressure; and a flow step of generating a flow of the drying fluid in the inner space by releasing, by the fluid exhaust unit, the drying fluid from the inner space while the fluid supply unit supplies the drying fluid into the inner space; and a pressure adjustment member installed at the flow line and configured to: measure pressure of the drying fluid flowing through the main exhaust line; and adjust the pressure in the inner space to the set pressure by adjusting an amount of the drying fluid released per unit time through the flow line. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that the pressure in the inner space is maintained at the set pressure while the flow step is performed. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that an amount of the drying fluid supplied into the inner space per unit time by the fluid supply unit is equal to an amount of the drying fluid released from the inner space per unit time by the fluid exhaust unit while the flow step is performed. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein the fluid exhaust unit further includes: a first exhaust valve configured to selectively flow the drying fluid through the main exhaust line, and wherein the controller is configured control the fluid supply unit and the fluid exhaust unit such that the first exhaust valve remains turned on while the flow step is performed. ### Claim 5 (depends on 4) The apparatus of claim 4, wherein the fluid exhaust unit further includes: a slow vent line branched from the main exhaust line; a second exhaust valve installed at the slow vent line; a quick vent line branched from the main exhaust line; and a third exhaust valve installed at the quick vent line, wherein the first exhaust valve is installed at the flow line, and wherein an amount of the drying fluid released per unit time through the quick vent line is greater than an amount of the drying fluid released per unit time through the slow vent line. ### Claim 6 (depends on 5) The apparatus of claim 5, wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit to perform: a first vent step of lowering the pressure in the inner space by releasing the drying fluid in the inner space through the slow vent line by turning on the second exhaust valve; and a second vent step of lowering the pressure in the inner space through the quick vent line by turning on the third exhaust valve. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that the flow step is performed for a time period between 20 seconds and 65 seconds. ### Claim 8 (depends on 7) The apparatus of claim 7, wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that the flow step is performed for a time period between 25 seconds and 65 seconds. ### Claim 9 (depends on 2) The apparatus of claim 2, wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that the set pressure has a value between 120 Bar and 150 Bar. ### Claim 10 (depends on 9) The apparatus of claim 9, wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that the set pressure is equal to 150 Bar. ### Claim 11 An apparatus for treating a substrate, the apparatus comprising: a body having an inner space in which the substrate is dried by a drying fluid in a supercritical state; a fluid supply unit configured to supply the drying fluid into the inner space; a fluid exhaust unit configured to release the drying fluid from the inner space; and a controller, wherein the fluid exhaust unit includes: a main exhaust line connected with the body; and a first exhaust valve configured to cause the drying fluid to selectively flow through the main exhaust line, wherein the controller is configured to perform: a pressure-raising step of raising pressure in the inner space to a set pressure; a flow step of maintaining the pressure in the inner space at the set pressure; and a vent step of lowering the pressure in the inner space, and wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that the first exhaust valve remains turned on during the flow step. ### Claim 12 (depends on 11) The apparatus of claim 11, wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that an amount of the drying fluid supplied per unit time by the fluid supply unit is equal to an amount of the drying fluid released per unit time through the main exhaust line during the flow step. ### Claim 13 (depends on 12) The apparatus of claim 12, wherein the fluid exhaust unit further includes a pressure adjustment member configured to adjust the pressure in the inner space to the set pressure, based on pressure of the drying fluid flowing through the main exhaust line during the flow step. ### Claim 14 (depends on 13) The apparatus of claim 13, wherein the main exhaust line branches into branch lines, and wherein the branch lines include: a vent line configured to lower the pressure in the inner space, and a flow line having the first exhaust valve and the pressure adjustment member installed thereon. ### Claim 15 (depends on 11) The apparatus of claim 11, wherein the fluid supply unit includes: a first supply line configured to supply the drying fluid from above the substrate supported in the inner space; and a second supply line configured to supply the drying fluid from below the substrate supported in the inner space. ### Claim 16 (depends on 11) The apparatus of claim 11, wherein the fluid supply unit includes: a first supply line configured to supply the drying fluid from a side to the substrate supported in the inner space; and a second supply line configured to supply the drying fluid from below the substrate supported in the inner space. ### Claim 17 An apparatus for treating a substrate, the apparatus comprising: a body having an inner space in which an organic solvent remaining on the substrate is dried by a drying fluid in a supercritical state; a fluid supply unit configured to supply the drying fluid into the inner space; a fluid exhaust unit configured to release the drying fluid from the inner space; and a controller, wherein the controller is configured to perform: a pressure-raising step of raising pressure in the inner space to a set pressure by supplying, by the fluid supply unit, the drying fluid into the inner space; a flow step of generating a flow of the drying fluid in the inner space by releasing, by the fluid exhaust unit, the drying fluid from the inner space while the fluid supply unit supplies the drying fluid into the inner space; and a vent step of lowering the pressure in the inner space by releasing, by the fluid exhaust unit, the drying fluid from the inner space, and wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that an amount of the drying fluid supplied into the inner space per unit time by the fluid supply unit is equal to an amount of the drying fluid released from the inner space per unit time by the fluid exhaust unit while the flow step is performed. ### Claim 18 (depends on 17) The apparatus of claim 17, wherein the fluid exhaust unit includes: a main exhaust line connected with the body and configured to evacuate the inner space; a vent line branched from the main exhaust line and lower the pressure in the inner space; a flow line branched from the main exhaust line; and a pressure adjustment member and a first exhaust valve installed at the flow line, wherein the pressure adjustment member is configured to adjust the pressure in the inner space to the set pressure, based on pressure of the drying fluid flowing through the main exhaust line, and wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that while the flow step is performed, the first exhaust valve remains turned on to release the drying fluid through the main exhaust line and the flow line. ### Claim 19 (depends on 18) The apparatus of claim 18, wherein the vent line includes: a quick vent line having a third exhaust valve installed at the quick vent line; and a slow vent line having a second exhaust valve installed at the slow vent line, wherein an amount of the drying fluid released per unit time through the slow vent line is less than an amount of the drying fluid released per unit time through the quick vent line, and wherein the controller is configured to control the second exhaust valve and the third exhaust valve such that in the vent step, the drying fluid is released through the quick vent line after the drying fluid is released through the slow vent line.