Decomposing/cleaning composition, method for cleaning adhesive polymer, and method for producing device wafer
AssigneeResonac Corporation
InventorsSusumu Nakazaki, Kuniaki Miyahara, Tomoyuki Fukuyo
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AssigneeResonac Corporation
InventorsSusumu Nakazaki, Kuniaki Miyahara, Tomoyuki Fukuyo
Estimating the term…
Provided is a decomposing/cleaning composition for an adhesive polymer having a high etching rate and suppressed infiltration into a contact interface between a substrate such as a device wafer and an adhesive layer such as a fixing tape. The decomposing/cleaning composition of one embodiment is a decomposing/cleaning composition for an adhesive polymer containing a quaternary alkylammonium fluoride or a quaternary alkylammonium fluoride hydrate and an aprotic solvent, wherein the aprotic solvent contains (A) an N-substituted amide compound having no active hydrogens on the nitrogen atoms and (B) at least one organic sulfur oxide selected from the group consisting of sulfoxide compounds and sulfone compounds.
A decomposing cleaning composition of an adhesive polymer comprising a quaternary alkylammonium fluoride or a hydrate of a quaternary alkylammonium fluoride, and an aprotic solvent, wherein the aprotic solvent comprises
Dependencies are inferred from the claim text.