Systems and methods for producing ultrapure water for semiconductor fabrication processes
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsEn Tian Lin, Shih-Hsiung Chiang
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Abstract
Systems and methods for producing ultrapure water (UPW) for use in semiconductor fabrication include an ABA module that performs an advanced oxidation process (AOP) pre-treatment step, a bioremediation step, and an advanced oxidation process post-treatment step. Raw water flows through the ABA module, which is part of a water treatment system for producing ultrapure water. The ultrapure water is then used in a semiconductor fabrication process.
Claims20
A method for producing ultrapure water (UPW) for use in semiconductor fabrication, comprising:
- treating raw water in a water treatment process to obtain the ultrapure water, wherein the water treatment process includes:
- an ABA module that performs:
- an advanced oxidation process (AOP) pre-treatment step that feeds a bioremediation step;
- and
- an advanced oxidation process post-treatment step that is fed by the bioremediation step,
- wherein the ABA module is directly upstream of a resin adsorption unit;
- a membrane degasification (MDG) unit downstream of the resin adsorption unit;
- and
- an ultrafiltration (UF) unit downstream of the MDG unit;
- wherein the raw water has a total organic carbon (TOC) content of greater than 0.1 ppm, and the resulting ultrapure water has a total organic carbon (TOC) content of less than 1.0 ppb.
A method for reclaiming waste water from a semiconductor manufacturing process, comprising:
- treating the waste water to produce an effluent;
- treating the effluent in an ABA module that performs:
- an advanced oxidation process (AOP) pre-treatment step that feeds a bioremediation step;
- and
- an advanced oxidation process post-treatment step that is fed by the bioremediation step;
- and
- sending the treated effluent to a raw water tank;
- wherein the ABA module comprises a biological reactor that receives a feed from a first oxidation reactor, a settler that receives a feed from the biological reactor, and a recycle loop from the settler to the first oxidation reactor, and an output from the biological reactor or the settler to a subsequent water treatment step.
A method for producing ultrapure water (UPW) for use in semiconductor fabrication, comprising:
- treating raw water in a water treatment system which includes:
- a multi-media filter (MMF);
- an activated carbon filter (ACF) downstream of the MMF;
- an ABA module downstream of the ACF that comprises:
- a first oxidation reactor for performing an advanced oxidation process (AOP) treatment;
- and
- a biological reactor that receives a feed from the first oxidation reactor for performing bioremediation;
- and
- a resin adsorption unit directly downstream of the ABA module;
- wherein the raw water has a total organic carbon (TOC) content of greater than 0.1 ppm, and the resulting ultrapure water has a total organic carbon (TOC) content of less than 1.0 ppb.
Dependencies are inferred from the claim text.