Sheet sticking apparatus
AssigneeDisco Corporation
InventorYoshinori Kakinuma
Life of this patent
Estimating the term…
Abstract
A sheet sticking apparatus includes a sticking unit that sticks a sheet to a workpiece held by a chuck table and a cutting unit that cuts the stuck sheet. The cutting unit includes a cutting blade that cuts the sheet, a movement unit that raises and lowers the cutting blade from and toward the chuck table or moves the cutting blade along the outer circumference of the workpiece, and a cleaning part that removes adhering things of the cutting blade. The cleaning part is disposed on the trajectory of the cutting blade that moves by the movement unit and executes cleaning by coming into contact with the cutting blade that moves.
Claims10
A sheet sticking apparatus comprising:
- a sticking unit that sticks a sheet to a workpiece held by a chuck table;
- and
- a cutting unit that cuts the stuck sheet,
- wherein the cutting unit includes:
- a cutting blade that cuts the sheet,
- a movement unit that raises and lowers the cutting blade from and toward the chuck table or moves the cutting blade along an outer circumference of the workpiece, and
- a cleaning part that removes adhering things from the cutting blade, and
- wherein the cleaning part is disposed in the chuck table on a trajectory of the cutting blade that moves by the movement unit and executes cleaning by coming into contact with the cutting blade that moves.
Dependencies are inferred from the claim text.