Liquid material vaporizing device
AssigneeHORIBA STEC, Co., Ltd.
InventorsHidetaka Yada, Soichiro Hirai, Akira Matsuura
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AssigneeHORIBA STEC, Co., Ltd.
InventorsHidetaka Yada, Soichiro Hirai, Akira Matsuura
Estimating the term…
The present invention is a liquid material vaporizing device that heats a liquid material supplying pipe without providing a heating mechanism, the liquid material vaporizing device including: a gas-liquid mixer unit configured to mix a liquid material and a gas to generate a gas-liquid mixture; a liquid material supplying pipe configured to supply the liquid material to the gas-liquid mixer unit; a vaporizer unit configured to heat the gas-liquid mixture to vaporize the liquid material; and a casing configured to house the gas-liquid mixer unit, the vaporizer unit, and the liquid material supplying pipe, in which a channel configured to guide convection of heat from the vaporizer unit to the liquid material supplying pipe is provided inside the casing.
A liquid material vaporizing device comprising:
Dependencies are inferred from the claim text.