Dielectric barrier plasma generator and plasma discharge starting method for dielectric barrier plasma generator

The dielectric barrier plasma generator comprising:

• a dielectric substrate having a first surface and a second surface;
• a high-voltage electrode having a proximal end and a distal end and located on the first surface of the dielectric substrate;
• a low-voltage electrode located to face the second surface of the dielectric substrate;
• a power introduction section located near one of the ends of the high-voltage electrode;
• a gas channel having a first end and a second end formed between the dielectric substrate and the low-voltage electrode in a direction from the first end to the second end to allow gas to flow from the first end of the gas channel to the second end while generating plasma thereof;
• a blowout outlet formed at the second end of the gas channel to blow out the gas that has flown through the gas channel and the plasma that has been generated in the gas channel, wherein a thickness between the first surface and the second surface of the dielectric substrate over a becomes thinner predetermined narrowing portion of the dielectric substrate as approaching closer to the blowout outlet;
• and
• a power supply unit having an applied voltage of 3 kV to 20 kV and a frequency of 20 kHz to 150 kHz to the high-voltage electrode so as to cause a dielectric barrier discharge between the high-voltage electrode and the low-voltage electrode through the dielectric substrate.

A plasma discharge starting method for a dielectric barrier plasma generator, providing:

• a dielectric substrate having a first surface and a second surface;
• a high-voltage electrode having a proximal end and a distal end and located on the first surface of the dielectric substrate;
• a low-voltage electrode located to face the second surface of the dielectric substrate;
• a power introduction section located near one of the ends of the high-voltage electrode;
• a gas channel having a first end and a second end formed between the dielectric substrate and the low-voltage electrode in a direction from the first end to the second end to allow gas to flow from the first end of the gas channel to the second end while generating plasma thereof;
• a blowout outlet formed at the second end of the gas channel to blow out the gas that has flown through the gas channel and the plasma that has been generated in the gas channel, wherein a thickness between the first surface and the second surface of the dielectric substrate becomes thinner over a predetermined narrowing portion of the dielectric substrate as approaching closer to the blowout outlet;
• and
• a clearance area located on the first surface of the dielectric substrate between the distal end of the high-voltage electrode,
• the plasma discharge starting method further comprising:
• a process A of introducing at least one type of starting gas selected from the group consisting of He, Ne, and Ar into the gas channel to generate plasma at a time of starting;
• a process B of introducing a gas for generating plasma into the gas channel after the process A;
• and
• a process C of preventing direct discharge between the high-voltage electrode and the low-voltage electrode while enabling the discharge between the high-voltage electrode and the low-voltage electrode through the dielectric substrate, thereby preventing damage to the high-voltage electrode, dielectric substrate, and low-voltage electrode.