# US 12,218,347 B2 · MEMS anode battery

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- Number: US 12,218,347 B2
- Document ID: US12218347B2
- Status: Granted
- Kind: B2
- Application number: 17/415,145
- Filed: 2019-12-17
- Published: 2022-02-24
- Granted: 2025-02-04
- Earliest claimed: 2018-12-20
- Assignees: PiMEMS, Inc.
- Applicants: PiMEMS, Inc.
- Inventors: Payam Bozorgi; Shannon Gott
- Web page: https://patentgrep.com/patent/US12218347B2

## CPC

- H01M 4/134: Electrodes based on metals, Si or alloys
- H01M 4/485: of mixed oxides or hydroxides for inserting or intercalating light metals, e.g. LiTi2O4 or LiTi2OxFy (H01M4/505, H01M4/525 take precedence)
- H01M 4/0402: {Methods of deposition of the material}
- H01M 4/1391: of electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx
- H01M 4/366: {as layered products}
- H01M 4/38: of elements or alloys
- H01M 4/483: {for non-aqueous cells (H01M4/485 takes precedence)}
- H01M 10/058: Construction or manufacture
- H01M 10/0525: Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
- H01M 2004/021: {Physical characteristics, e.g. porosity, surface area}
- Y02E 60/10: Energy storage using batteries
- Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product
- H01M: PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

The present application discloses a microfabricated micron-scale battery having excellent performance attributes. The battery using a titanium anode which is etched to form a plurality of raised features on the titanium anode. The raised features are coated conformally with a highly conductive metal. A layer of titanium is then formed over the highly conductive metal. This titanium layer is then oxidized to provide further small scale roughness. The roughness increases the surface area which improves the uptake of lithium ions by the anode. The battery can be combined with a titanium thermal ground plane to further enhance performance by removing heat from the battery.

## Claims

### Claim 1

A method for fabricating a battery, comprising:
providing a metal anode;
etching a plurality of microfabricated raised features into the metal anode, wherein the microfabricated raised metal features have an aspect ratio of at least 1 and a pitch of between 1-50 microns; and
depositing a metal coating of a second metal conformally over the metal anode and the plurality of microfabricated raised features;
depositing another layer of a metal over the metal coating, and oxidizing the layer of metal to form a layer of metal oxide having a microfabricated microroughness in the layer of metal oxide of at least 1 nm rms wherein the layer of metal comprises a layer of titanium, and the metal oxide comprises titanium dioxide, such that the microroughness is formed in the titanium dioxide as nanostructured titanium (NST).

### Claim 2

A method for fabricating a battery, comprising:
providing a metal anode;
etching a plurality of microfabricated raised features into the metal anode, wherein the microfabricated raised metal features have an aspect ratio of at least 1 and a pitch of between 1-50 microns; and
depositing a metal coating of a second metal conformally over the metal anode and the plurality of microfabricated raised features wherein the metal coating of the second metal has a thickness of less than 10 microns, and comprises at least one of gold, silver, copper, platinum and aluminum:
depositing another layer of a metal over the metal coating, and oxidizing the layer of metal to form a layer of metal oxide having a microfabricated microroughness in the layer of metal oxide of at least 1 nm rms.

### Claim 3

A battery comprising:
a metal anode made of a first metal having a plurality of microfabricated raised features, wherein the microfabricated raised features have an aspect ratio height/diameter of at least 1;
a metal coating of a second metal that is dissimilar to said first metal, said coating is conformal to the metal anode and the microfabricated raised features;
a second metal coating conformally covers said anode and said second metal, said second metal coating then being oxidized to form a metal oxide covering said second metal and said oxidized second metal coating in direct contact with said second metal wherein the metal oxide layer has a microfabricated microroughness of at least 1 nm rms.