# US 12,218,288 B2 · Display device including inorganic layers with different porosity and method of manufacturing display device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,218,288 B2 - Document ID: US12218288B2 - Status: Granted - Kind: B2 - Application number: 17/723,777 - Filed: 2022-04-19 - Published: 2023-03-30 - Granted: 2025-02-04 - Earliest claimed: 2021-09-24 - Assignees: Samsung Display Co., Ltd. - Applicants: Samsung Display Co., LTD. - Inventors: Young Gu Kim; Yun Hee Park; Ji Yun Park; Suk Kung Chei; Kyung Seon Tak - Web page: https://patentgrep.com/patent/US12218288B2 ## CPC - H01L 33/502 - H01L 33/005 - H01L 2933/0041 - H01L ## Abstract A display device includes a light emitting element disposed on a substrate. A color conversion layer is disposed on the light emitting element, the color conversion layer including color conversion particles that convert light of a first color emitted from the light emitting element into light of a second color. An insulating layer is disposed on the color conversion layer. The insulating layer includes a first inorganic layer overlapping the color conversion layer, a second inorganic layer disposed on the first inorganic layer, and a third inorganic layer disposed on the second inorganic layer. A second porosity of the second inorganic layer is greater than a first porosity of the first inorganic layer. A second porosity of the second inorganic layer is greater than a third porosity of the third inorganic layer. ## Claims ### Claim 1 A display device comprising: a light emitting element disposed on a substrate; a color conversion layer disposed on the light emitting element, the color conversion layer including color conversion particles that convert light of a first color emitted from the light emitting element into light of a second color; and an insulating layer disposed on the color conversion layer, the insulating layer including: a first inorganic layer overlapping the color conversion layer; a second inorganic layer disposed on the first inorganic layer; and a third inorganic layer disposed on the second inorganic layer, wherein a second porosity of the second inorganic layer is greater than a first porosity of the first inorganic layer, and the second porosity of the second inorganic layer is greater than a third porosity of the third inorganic layer. ### Claim 2 (depends on 1) The display device according to claim 1, wherein the second porosity of the second inorganic layer is within a range of about 20% to about 80%. ### Claim 3 (depends on 1) The display device according to claim 1, wherein the first porosity of the first inorganic layer is less than a third porosity of the third inorganic layer. ### Claim 4 (depends on 1) The display device according to claim 1, wherein the first porosity of the first inorganic layer is less than or equal to about 5%, and the third porosity of the third inorganic layer is less than or equal to about 20%. ### Claim 5 (depends on 1) The display device according to claim 1, wherein a second refractive index of the second inorganic layer is less than a first refractive index of the first inorganic layer. ### Claim 6 (depends on 5) The display device according to claim 5, wherein the second refractive index of the second inorganic layer is within a range of about 1.1 to about 1.3. ### Claim 7 (depends on 6) The display device according to claim 6, wherein the second refractive index of the second inorganic layer is about 1.2. ### Claim 8 (depends on 1) The display device according to claim 1, wherein a thickness of the second inorganic layer is within a range of about 0.3 μm to about 0.6 μm. ### Claim 9 (depends on 8) The display device according to claim 8, wherein a thickness of the first inorganic layer is greater than or equal to about 0.1 μm, and a thickness of the third inorganic layer is greater than or equal to about 0.1 μm. ### Claim 10 (depends on 1) The display device according to claim 1, wherein the first inorganic layer, the second inorganic layer, and the third inorganic layer include a same material. ### Claim 11 (depends on 1) The display device according to claim 1, wherein at least part of the first inorganic layer, the second inorganic layer, and the third inorganic layer include different materials. ### Claim 12 (depends on 1) The display device according to claim 1, wherein the second inorganic layer includes hydrogenated amorphous silicon (a-Si:H). ### Claim 13 (depends on 11) The display device according to claim 11, wherein the second inorganic layer further includes at least one of silicon oxide (SiOx), silicon nitride (SiNx), and silicon oxynitride (SiON). ### Claim 14 (depends on 13) The display device according to claim 13, wherein the insulating layer does not include hollow silica and an organic material. ### Claim 15 (depends on 1) The display device according to claim 1, wherein the first inorganic layer, the second inorganic layer, and the third inorganic layer are formed through chemical vapor deposition, and a deposition condition of the second inorganic layer is different from a deposition condition of the first inorganic layer. ### Claim 16 (depends on 1) The display device according to claim 1, further comprising: a color filter disposed on the insulating layer; and an overcoat layer disposed on the color filter. ### Claim 17 (depends on 1) The display device according to claim 1, wherein the light emitting element includes an inorganic light emitting diode. ### Claim 18 A method of manufacturing a display device, the method comprising: forming a color conversion layer on a display element layer that includes a light emitting element; and forming an insulating layer on the color conversion layer through chemical vapor deposition, wherein the forming of the insulating layer includes: forming a first inorganic layer on the color conversion layer under a first deposition condition; forming a second inorganic layer on the first inorganic layer under a second deposition condition; and forming a third inorganic layer on the second inorganic layer, wherein the first deposition condition is different from the second deposition condition, and a second porosity of the second inorganic layer is greater than a first porosity of the first inorganic layer. ### Claim 19 (depends on 18) The method according to claim 18, wherein the first porosity of the first inorganic layer is less than a third porosity of the third inorganic layer. ### Claim 20 (depends on 18) The method according to claim 18, wherein a second refractive index of the second inorganic layer is less than a first refractive index of the first inorganic layer.