# US 12,218,162 B2 · Optoelectronic device and method of producing an optoelectronic device

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- Number: US 12,218,162 B2
- Document ID: US12218162B2
- Status: Granted
- Kind: B2
- Application number: 17/634,665
- Filed: 2020-07-21
- Published: 2022-11-10
- Granted: 2025-02-04
- Earliest claimed: 2019-08-12
- Assignees: Ams AG
- Applicants: ams AG
- Inventors: Patrik Pertl; Gerhard Eilmsteiner
- Web page: https://patentgrep.com/patent/US12218162B2

## CPC

- H10F 39/8053: {Colour filters}
- H10F 77/334: {for shielding light, e.g. light blocking layers or cold shields for infrared detectors}
- G02B 1/116: including electrically conducting layers
- H10F 39/8057: {Optical shielding}
- H10F 39/806: {Optical elements or arrangements associated with the image sensors}
- H10F 77/50: Encapsulations or containers (for photovoltaic modules H10F19/80)
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

An optoelectronic device comprises a substrate with a photosensitive structure, a dielectric layer on a main surface of the substrate, the dielectric layer having a top surface facing away from the substrate. At least one wiring layer is arranged in the dielectric layer in places and at least one contact area is formed by a portion of the at least one wiring layer. An opening is formed at the top surface of the dielectric layer, the opening extending towards the contact area. An optical element is arranged on the top surface of the dielectric layer above the photosensitive structure and an optical filter is arranged on the top surface of the dielectric layer, the optical filter being electrically conductive, covering a portion of the optical element and being in electrical contact with the contact area. Furthermore, a method for producing an optoelectronic device is provided.

## Claims

### Claim 1

An optoelectronic device, comprising:
a substrate with a photosensitive structure,
a dielectric layer on a main surface of the substrate, the dielectric layer having a top surface facing away from the substrate,
at least one wiring layer arranged in the dielectric layer in places,
at least one contact area formed by a portion of the at least one wiring layer,
an opening in the dielectric layer at the top surface, the opening extending towards the contact area,
an optical element arranged on the top surface of the dielectric layer above the photosensitive structure, and
an optical filter arranged on the top surface of the dielectric layer, the optical filter being electrically conductive, covering a portion of the optical element, providing an aperture towards the photosensitive structure, and being in electrical contact with the contact area.

### Claim 2 (depends on 1)

The optoelectronic device according to claim 1, wherein
the optical filter covers a bottom part, the sidewalls and the edges of the opening at the top surface of the dielectric layer and electrically contacts the contact area.

### Claim 3 (depends on 1)

The optoelectronic device according to claim 1, comprising:
a spacer structure, the spacer structure covering a bottom part, the sidewalls and the edges of the opening at the top surface of the dielectric layer and electrically connecting the contact area to the optical filter.

### Claim 4 (depends on 3)

The optoelectronic device according to claim 3, wherein
the spacer structure (20) comprises a stack of at least two electrically conductive layers.

### Claim 5 (depends on 1)

The optoelectronic device according to claim 1, wherein
the optical filter comprises an electrically conductive layer.

### Claim 6 (depends on 1)

The optoelectronic device according to claim 1, wherein
the optical filter comprises an anti-reflective coating, an organic color coating or a black chromium coating.

### Claim 7 (depends on 1)

The optoelectronic device according to claim 1, comprising:
a passivation layer arranged in places in the dielectric layer above the at least one wiring layer.

### Claim 8 (depends on 1)

The optoelectronic device according to claim 1, comprising:
an integrated circuit in the substrate.

### Claim 9 (depends on 1)

The optoelectronic device according to claim 1, wherein
the optical element is an interference filter.

### Claim 10 (depends on 1)

The optoelectronic device according to claim 1, wherein
the photosensitive structure (4) is a single photodiode or an array of photodiodes.

### Claim 11 (depends on 1)

An electronic device comprising an optoelectronic device according to claim 1, wherein in particular the electronic device is a camera system or an electromagnetic radiation sensor.

### Claim 12

An optoelectronic device, comprising:
a substrate with a photosensitive structure,
a dielectric layer on a main surface of the substrate, the dielectric layer having a top surface facing away from the substrate,
at least one wiring layer arranged in the dielectric layer in places,
at least one contact area formed by a portion of the at least one wiring layer,
an opening in the dielectric layer at the top surface, the opening extending towards the contact area,
an optical element arranged on the top surface of the dielectric layer above the photosensitive structure, and
an optical filter comprising an anti-reflective coating, an organic color coating or a black chromium coating, arranged on the top surface of the dielectric layer, the optical filter being electrically conductive, covering a portion of the optical element and being in electrical contact with the contact area.

### Claim 13

An optoelectronic device, comprising:
a substrate with a photosensitive structure,
a dielectric layer on a main surface of the substrate, the dielectric layer having a top surface facing away from the substrate,
at least one wiring layer arranged in the dielectric layer in places,
at least one contact area formed by a portion of the at least one wiring layer,
an opening in the dielectric layer at the top surface, the opening extending towards the contact area,
an optical element comprising an interference filter, arranged on the top surface of the dielectric layer above the photosensitive structure, and
an optical filter arranged on the top surface of the dielectric layer, the optical filter being electrically conductive, covering a portion of the optical element and being in electrical contact with the contact area.
