# US 12,217,997 B2 · Cleanroom compatible robotic end effector exchange system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,217,997 B2 - Document ID: US12217997B2 - Status: Granted - Kind: B2 - Application number: 18/156,131 - Filed: 2023-01-18 - Published: 2023-09-21 - Granted: 2025-02-04 - Earliest claimed: 2022-02-07 - Assignees: KLA Corporation - Applicants: Kla Corporation - Inventors: Benjamin James Thomas Clarke; Asaf Wiseman; Tzachi Pressburger; Michael Brisman; Joseph A. Di Regolo - Web page: https://patentgrep.com/patent/US12217997B2 ## CPC - B25J 11/0095: {Manipulators transporting wafers} - H10P 72/7602: {the wafers being placed on a robot blade or gripped by a gripper for conveyance} - B25J 15/0408: {Connections means} - B25J 15/0425: {having cams} - B25J 15/0433: {having gripping members} - B25J 15/0491: {comprising end-effector racks} - B25J 19/0075: {Means for protecting the manipulator from its environment or vice versa} - G01B 11/06: for measuring thickness {; e.g. of sheet material (thickness measurement by thermal means G01B21/085)} - Y10T 29/49947: by applying separate fastener - B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50}) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract The system includes a robot interface disposed on a robot arm, and an end effector configured to selectively couple to the robot arm via the robot interface. The end effector includes an upper jaw, a lower jaw, and a pair of arms configured to carry a substrate. The upper jaw and the lower jaw are spaced apart in a first direction and biased together, and the pair of arms are spaced apart in a second direction orthogonal to the first direction. When the end effector is coupled to the robot arm, the robot interface is disposed between the upper jaw and the lower jaw. To exchange the end effector, the upper jaw and the lower jaw can be separated to release the robot interface. ## Claims ### Claim 1 A method comprising: disposing a robot interface on a robot arm; selectively coupling an end effector to the robot arm via the robot interface, wherein the end effector comprises an upper jaw and a lower jaw, the upper jaw and the lower jaw being spaced apart in a first direction and biased together; and disposing a substrate on a pair of arms of the end effector, the pair of arms being spaced apart in a second direction orthogonal to the first direction; wherein when the end effector is coupled to the robot arm, the robot interface is disposed between the upper jaw and the lower jaw. ### Claim 2 (depends on 1) The method of claim 1, wherein the end effector further comprises a spring connected to the upper jaw and the lower jaw, and the spring is pre-loaded to urge the upper jaw and the lower jaw together. ### Claim 3 (depends on 1) The method of claim 1, wherein a first kinematic coupling is provided between an upper surface of the lower jaw and a lower surface of the robot interface. ### Claim 4 (depends on 3) The method of claim 3, wherein a second kinematic coupling is provided between a lower surface of the upper jaw and an upper surface of the robot interface. ### Claim 5 (depends on 1) The method of claim 1, wherein the end effector further comprises a plunger and the robot interface further comprises a plunger socket, and when the end effector is coupled to the robot arm, the plunger is coupled to the plunger socket and is movable in an axial direction by the robot arm. ### Claim 6 (depends on 1) The method of claim 1, wherein selectively coupling the end effector to the robot arm via the robot interface comprises: separating the upper jaw and the lower jaw with a tool exchanger comprising a pair of grip arms; inserting the robot interface between the upper jaw and the lower jaw; and closing the upper jaw and the lower jaw onto the robot interface. ### Claim 7 (depends on 6) The method of claim 6, wherein the tool exchanger is disposed in a garage, and separating the upper jaw and the lower jaw with the tool exchanger comprising the pair of grip arms comprises: separating the upper jaw and the lower jaw with the pair of grip arms when the end effector is positioned in the garage. ### Claim 8 (depends on 7) The method of claim 7, further comprising detecting, by an optical sensor, when the end effector is positioned in the garage. ### Claim 9 (depends on 7) The method of claim 7, further comprising detecting, by a measurement sensor, a thickness of the end effector positioned in the garage.