# US 12,217,950 B2 · Magnet system, sputtering device and housing cover > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,217,950 B2 - Document ID: US12217950B2 - Status: Granted - Kind: B2 - Application number: 17/985,175 - Filed: 2022-11-11 - Published: 2023-05-18 - Granted: 2025-02-04 - Earliest claimed: 2021-11-12 - Assignees: Von Ardenne Asset GmbH & Co. KG - Applicants: VON ARDENNE Asset GmbH & Co. KG - Inventors: Thorsten Sander; Klaus Schneider; Frank Meissner; Goetz Grosser; Steffen Mosshammer - Web page: https://patentgrep.com/patent/US12217950B2 ## CPC - H01J 37/3455: {Movable magnets} - C23C 14/35: by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)} - H01J 37/3405: {Magnetron sputtering} - H01J 37/342: {Hollow targets} - H01J 37/345: {Magnet arrangements in particular for cathodic sputtering apparatus (material of magnets or magnets in general H01F1/00, H01F7/00)} - H01J 37/347: {Thickness uniformity of coated layers or desired profile of target erosion} - F16H 1/10: one of the members being internally toothed - F16H 2055/176: {Ring gears with inner teeth} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - F16H: GEARING ## Abstract Disclosed herein are systems, methods, devices for a magnet system that includes a housing with a housing interior. The magnet system also includes a magnet holder disposed in the housing interior and supported by the housing, preferably stationary with respect thereto. The magnet system also includes a housing cover forming a fluid-tight chamber when mated with the housing, wherein the housing cover includes a gear stage, a generator, and a rotary coupling that couples the gear stage to the generator. ## Claims ### Claim 1 A magnet system comprising: a housing comprising a housing interior; a magnet holder arranged in the housing interior and rigidly attached to the housing; and a housing cover which, when assembled with the housing, forms a fluid-tight chamber, wherein the housing cover comprises: a gear stage; a generator; and a rotary coupling that couples the gear stage to the generator. ### Claim 2 (depends on 1) The magnet system of claim 1, wherein the housing cover comprises a flange disposed between the gear stage and the generator, wherein the rotary coupling couples the gear stage and generator together through the flange. ### Claim 3 (depends on 2) The magnet system of claim 2, wherein the housing cover comprises a pivot bearing by means of which a drive-side gear wheel of the gear stage is coupled to the flange. ### Claim 4 (depends on 3) The magnet system of claim 3, the magnet system further comprising a supporting device fixedly coupled to the flange, wherein the supporting device rotatably supports the drive-side gear wheel relative to the flange or the generator. ### Claim 5 (depends on 1) The magnet system of claim 1, wherein the magnet holder is mounted so as to be stationary with respect to the housing. ### Claim 6 (depends on 1) The magnet system of claim 1, wherein the housing is non-magnetic. ### Claim 7 (depends on 1) The magnet system of claim 1, wherein the gear stage comprises a generator side gear wheel that contacts the drive side gear wheel or the rotary coupling. ### Claim 8 (depends on 1) The magnet system of claim 1, wherein the housing cover comprises a drive side drive coupling that is configured to transmit torque to the gear stage or that is supported by the gear stage. ### Claim 9 (depends on 8) The magnet system of claim 8, wherein the drive side coupling comprises a torque support attached to the gear stage and extending away from the generator. ### Claim 10 (depends on 1) The magnet system of claim 1, wherein the gear stage comprises an inner toothed rim as a drive side gear wheel of the gear stage. ### Claim 11 (depends on 1) The magnet system of claim 1, wherein the housing cover comprises a communication interface that is fixedly coupled to the generator, wherein the gear stage is arranged between the generator and the communication interface. ### Claim 12 (depends on 11) The magnet system of claim 11, wherein the communication interface comprises a plate electrode, wherein the housing cover comprises an electrical connection, is arranged to face the generator, and is electrically conductively coupled to the plate electrode. ### Claim 13 (depends on 1) The magnet system of claim 1, further comprising: an actuator electrically powered by the generator, wherein the actuator comprises a control input and is conductively coupled to the housing cover; and a magnet coupled to the magnet holder via the actuator and arranged in the housing interior, wherein the actuator is configured to change a position of the magnet relative to the magnet holder in response to an electrical communication signal supplied from the rotary coupling to the control input. ### Claim 14 A sputtering device comprising: a bearing device; and a magnet system comprising: a housing comprising a housing interior; a magnet holder arranged in the housing interior and rigidly attached to the housing; and a housing cover which, when assembled with the housing, forms a fluid-tight chamber, wherein the housing cover comprises: a gear stage; a generator; and a rotary coupling that couples the gear stage to the generator, wherein the magnet system is stationarily supported within a sputtering target by means of the bearing device. ### Claim 15 (depends on 14) The sputtering device of claim 14, wherein the gear stage comprises a first gear wheel with a recess and a second gear wheel arranged in the recess of the first gear. ### Claim 16 (depends on 15) The sputtering device of claim 15, wherein the first gear wheel is configured to couple torque from the second gear wheel to the generator. ### Claim 17 (depends on 14) The sputtering device of claim 14, wherein the bearing device comprises a fixed bearing or a rotary bearing. ### Claim 18 (depends on 14) The sputtering device of claim 14, wherein the bearing devices comprises an end block for rotatably supporting the sputtering target. ### Claim 19 A housing cover comprising: a first gear wheel; a generator; a flange penetrated by a through-hole, wherein the flange is positioned between the first gear wheel and the generator and has a sealing surface on a side facing the generator, wherein the generator is rigidly coupled to the flange on an end face of the flange; a second gear wheel coupled to the first gear wheel; and a rotary coupling configured to couple rotary motion of the second gear wheel to the generator through the through-hole, wherein the housing cover is a unitary assembly that may be mounted on or demounted from a housing. ### Claim 20 (depends on 14) The sputtering device of claim 14, wherein the generator comprises a stator, wherein the generator extends away from the flange.