# US 12,217,945 B2 · Sorption chamber walls for semiconductor equipment > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,217,945 B2 - Document ID: US12217945B2 - Status: Granted - Kind: B2 - Application number: 17/639,324 - Filed: 2020-08-06 - Published: 2022-10-06 - Granted: 2025-02-04 - Earliest claimed: 2019-09-06 - Assignees: Lam Research Corporation - Applicants: Lam Research Corporation - Inventors: Hossein Sadeghi; Richard A. Gottscho - Web page: https://patentgrep.com/patent/US12217945B2 ## CPC - H01J 37/32477: {characterised by the means for protecting vessels or internal parts, e.g. coatings} - H01J 37/32862: {In situ cleaning of vessels and/or internal parts} - B01D 53/04: with stationary adsorbents {(B01D53/025 takes precedence)} - B01D 53/0407: {Constructional details of adsorbing systems} - B01D 53/0438: {Cooling or heating systems} - B01D 53/0446: {Means for feeding or distributing gases} - H01J 37/32522: {Temperature} - H01J 37/32568: {Relative arrangement or disposition of electrodes; moving means} - H01J 37/32816: {Pressure} - H01J 37/32871: {Means for trapping or directing unwanted particles} - B01D 2256/10: Nitrogen - B01D 2259/40096: by using electrical resistance heating - H01J 2237/002: Cooling arrangements - H01J 2237/24585: Other variables, e.g. energy, mass, velocity, time, temperature - H01J 2237/334: Etching - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - B01D: SEPARATION (separating solids from solids by wet methods B03B, B03D; by pneumatic jigs or tables B03B; by other dry methods B07; magnetic or electrostatic separation of solid materials from solid materials or fluids, separation by high-voltage electric fields B03C; centrifuges, vortex apparatus B04; presses per se for squeezing-out liquid from liquid-containing material B30B9/02; treatment of water C02F, e.g. softening by ion-exchange C02F1/42; {arrangements of air intake cleaners in gas turbine plants F02C7/05} ; arrangements or mounting of filters in air-conditioning, air-humidification or ventilation F24F13/28) ## Abstract A sorption structure used in a plasma process chamber includes an inner layer having one or more heating elements to heat the sorption structure, a middle section having a lattice structure and a coolant flow delivery network through which a coolant circulates to cool the sorption structure, and a vacuum flow network that is connected to a vacuum line to create low pressure vacuum. The lattice structure includes network of openings defined in a plurality of layers. The inner layer is disposed adjacent to the middle section and an outer layer of the lattice structure faces an interior region of the chamber. The openings in the layers of the lattice structure progressively increase in size from the inner layer to the outer layer. The lattice structure is used to adsorb by-products released in the process chamber and the vacuum flow network is used to remove the by-products. ## Claims ### Claim 1 A sorption structure integrated into a portion of a chamber used for processing a substrate, the sorption structure comprising: an inner section having one or more heating elements; a middle section having a coolant delivery network to receive and circulate a coolant from a coolant source and a plurality of vacuum conduits connected to a vacuum line, wherein the middle section is disposed adjacent to the inner section; a lattice structure having an inner layer defined adjacent to the middle section and an outer layer defined adjacent to the inner layer and configured to face an interior region of the chamber, wherein the inner layer and the outer layer include a network of openings, and wherein the plurality of vacuum conduits are configured to connect to the lattice structure via the inner layer, wherein the vacuum line and the plurality of vacuum conduits are configured to be used during processing to create a low pressure region in the lattice structure relative to a pressure in the chamber to adsorb by-products released in the chamber during the processing of the substrate. ### Claim 2 (depends on 1) The sorption structure of claim 1, wherein the vacuum line is connected to a pump. ### Claim 3 (depends on 1) The sorption structure of claim 1, wherein the coolant delivery network includes a coolant inlet to receive the coolant from the coolant source, a coolant outlet and one or more channels defined between the coolant inlet and the coolant outlet to allow the coolant to flow. ### Claim 4 (depends on 1) The sorption structure of claim 1, wherein the coolant delivery network is configured to maintain the lattice structure at a first temperature during processing. ### Claim 5 (depends on 1) The sorption structure of claim 1, wherein the sorption structure is configured to be integrated into a portion of a wall of the chamber that aligns with a gap defined between an upper electrode and a lower electrode disposed in the chamber. ### Claim 6 (depends on 1) The sorption structure of claim 1, wherein the sorption structure is configured to be integrated into a portion of a plasma confinement structure defined in the chamber, the portion of the plasma confinement structure aligns with a gap defined between an upper electrode and a lower electrode disposed in the chamber. ### Claim 7 (depends on 1) The sorption structure of claim 1, wherein the sorption structure is integrated into a portion of an inner liner defined in the chamber, the portion of the inner liner aligns with a gap defined between an upper electrode and a lower electrode disposed in the chamber. ### Claim 8 (depends on 1) The sorption structure of claim 1, wherein a size of the openings in the inner layer is different from a size of the openings in the outer layer. ### Claim 9 (depends on 8) The sorption structure of claim 8, wherein the size of the openings within the network of openings progressively increases from the inner layer to the outer layer. ### Claim 10 (depends on 1) The sorption structure of claim 1, wherein a size of the openings is based on a size of a gap defined between an upper electrode and a lower electrode disposed in the chamber. ### Claim 11 (depends on 1) The sorption structure of claim 1, wherein a size of the openings is based on at least one of a type of reactant gas to be used in the chamber and a type of by-products expected to be present in the chamber. ### Claim 12 (depends on 1) The sorption structure of claim 1, wherein the plurality of vacuum conduits are configured to connect to a gas source to apply high-pressure gas from the gas source to the inner layer of the lattice structure to assist in releasing the by-products, the high-pressure gas is received during a desorption operation for removing the by-products from the chamber. ### Claim 13 (depends on 1) The sorption structure of claim 1, wherein the vacuum line further includes a pressure sensor disposed between the lattice structure and a pump, the pressure sensor used to monitor pressure of the by-products and any reactant gas flowing out of the chamber via the vacuum line. ### Claim 14 (depends on 1) The sorption structure of claim 1, wherein the sorption structure is a single, continuous piece that is configured to fit in the portion of the chamber, the portion of the chamber including conduits to route one or more inputs and outputs of the sorption structure. ### Claim 15 (depends on 1) The sorption structure of claim 1, wherein the sorption structure is a sectional piece that covers a sub-portion of the portion of the chamber, the portion of the chamber including a plurality of the sectional pieces distributed along a circumference of the portion of the chamber, the portion of the chamber includes conduits to route inputs and outputs of the plurality of sectional pieces of the sorption structure. ### Claim 16 (depends on 15) The sorption structure of claim 15, wherein each sectional piece of the plurality of sectional pieces is separated from an adjacent sectional piece by an angle of separation. ### Claim 17 (depends on 16) The sorption structure of claim 16, wherein the angle of separation is between about 5° to about 10°. ### Claim 18 (depends on 15) The sorption structure of claim 15, wherein the inputs and outputs of the plurality of sectional pieces is routed through a single conduit defined in a back side of the portion of the chamber and through channels defined in a wall of the chamber or through a lower electrode defined in the chamber. ### Claim 19 (depends on 1) The sorption structure of claim 1, wherein the one or more heating elements in the inner section are engaged during a desorption step and are configured to heat the sorption structure to a second temperature to release the by-products adsorbed on the lattice structure. ### Claim 20 A method for removing by-products using a sorption structure integrated in a portion of a chamber used for processing a substrate, the method comprising: cooling the sorption structure to a first temperature by circulating a coolant from a coolant source through one or more channels of a coolant delivery network defined within a middle section of the sorption structure; using a plurality of vacuum conduits defined in the middle section to create a low pressure region in a lattice structure defined adjacent to the middle section, the plurality of vacuum conduits being coupled to a vacuum line, wherein an outer layer of the lattice structure is exposed to an interior region of the chamber, the low pressure region causes the by-products present within the chamber to be adsorbed in a plurality of openings of the lattice structure; heating the sorption structure to a second temperature using one or more heating elements defined in an inner section of the sorption structure, to release the by-products that have adsorbed in the plurality of openings of the lattice structure, wherein the middle section is disposed between the inner section and the lattice structure; and removing the by-products released from the lattice structure through the plurality of vacuum conduits coupled to the vacuum line. ### Claim 21 (depends on 20) The method of claim 20, wherein the vacuum line is coupled to a pump. ### Claim 22 (depends on 21) The method of claim 21, further comprising: monitoring pressure of the by-products flowing through the vacuum line; and when the pressure of the by-products is below a pre-defined threshold point, initiating the heating of the sorption structure to remove the by-products adsorbed in the plurality of openings. ### Claim 23 (depends on 20) The method of claim 20, wherein the first temperature is defined to be sufficient to condense the by-products present in the chamber. ### Claim 24 (depends on 20) The method of claim 20, wherein the cooling and using the plurality of vacuum conduits to create the low pressure region are performed during processing of the substrate, and wherein the heating and the removing of the by-products are performed with waferless auto clean (WAC) when no substrate is present in the chamber. ### Claim 25 (depends on 20) The method of claim 20, further includes, applying a gas to an inner layer of the lattice structure through the vacuum line and the plurality of vacuum conduits, the gas being applied from a gas source coupled to the vacuum line at a defined pressure, so as to create a force that is sufficient to release the by-products adsorbed on the lattice structure; and removing the by-products released from the lattice structure through a primary vacuum line defined in the chamber. ### Claim 26 (depends on 25) The method of claim 25, wherein the primary vacuum line is different from the vacuum line that is coupled to the plurality of vacuum conduits. ### Claim 27 (depends on 25) The method of claim 25, wherein the gas is Nitrogen.