# US 12,217,943 B2 · Substrate processing apparatus and electrostatic chuck > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,217,943 B2 - Document ID: US12217943B2 - Status: Granted - Kind: B2 - Application number: 17/846,033 - Filed: 2022-06-22 - Published: 2022-12-22 - Granted: 2025-02-04 - Earliest claimed: 2021-06-22 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Kohei Otsuki; Shin Yamaguchi; Daisuke Satake - Web page: https://patentgrep.com/patent/US12217943B2 ## CPC - H01J 37/32724: {Temperature} - H01J 37/32449: {Gas control, e.g. control of the gas flow} - H01J 37/32513: {Sealing means, e.g. sealing between different parts of the vessel} - H01J 37/32816: {Pressure} - H10P 72/0402: {Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence)} - H10P 72/0434: {mainly by convection} - H10P 72/72: using electrostatic chucks - H10P 72/7614: {characterised by a plurality of individual support members, e.g. support posts or protrusions} - H10P 72/722: {Details of electrostatic chucks} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A substrate processing apparatus is provided. The apparatus comprises a chamber; a substrate support which is arranged in the chamber and has at least one first gas supply path; and at least one control valve configured to control a flow rate or pressure of gas supplied through the at least one first gas supply path. The substrate support includes a base, and an electrostatic chuck which is arranged on the base and has an upper surface. The upper surface has a plurality of protrusions and a first annular groove group. The first annular groove group comprises a first inner annular groove, a first intermediate annular groove, and a first outer annular groove. Any one of the first inner annular groove, the first intermediate annular groove, and the first outer annular groove communicates with the at least one first gas supply path. ## Claims ### Claim 1 A substrate processing apparatus, comprising: a chamber; a substrate support which is arranged in the chamber and has at least one first gas supply path; and at least one control valve configured to control a flow rate or pressure of gas supplied through the at least one first gas supply path, wherein: the substrate support includes a base, and an electrostatic chuck which is arranged on the base and has an upper surface; the upper surface has a plurality of protrusions and a first annular groove group; the first annular groove group comprises a first inner annular groove, a first intermediate annular groove, and a first outer annular groove; and any one of the first inner annular groove, the first intermediate annular groove, and the first outer annular groove communicates with the at least one first gas supply path; wherein the substrate support further has at least one second gas supply path; the upper surface of the electrostatic chuck further has a second annular groove group surrounding the first annular groove group; the second annular groove group comprises a second inner annular groove, a second intermediate annular groove, and a second outer annular groove; any one of the second inner annular groove, the second intermediate annular groove, and the second outer annular groove communicates with the at least one second gas supply path; and the at least one control valve is configured to control a flow rate or pressure of gas supplied through the at least one first gas supply path and the at least one second gas supply path; and the substrate support further has at least one third gas supply path; the upper surface of the electrostatic chuck further has a third annular groove group surrounding the second annular groove group; the third annular groove group comprises a third inner annular groove and a third outer annular groove; any one of the third inner annular groove and the third outer annular groove communicates with the at least one third gas supply path; and the at least one control valve is configured to control a flow rate or pressure of gas supplied through the at least one first gas supply path, the at least one second gas supply path, and the at least one third gas supply path. ### Claim 2 (depends on 1) The substrate processing apparatus of claim 1, wherein the at least one control valve comprises: a first control valve configured to independently control a flow rate or pressure of gas supplied through the at least one first gas supply path; and a second control valve configured to independently control a flow rate or pressure of gas supplied through the at least one second gas supply path. ### Claim 3 (depends on 1) The substrate processing apparatus of claim 1, wherein the at least one control valve comprises: a first control valve configured to independently control a flow rate or pressure of gas supplied through the at least one first gas supply path; a second control valve configured to independently control a flow rate or pressure of gas supplied through the at least one second gas supply path; and a third control valve configured to independently control a flow rate or pressure of gas supplied through the at least one third gas supply path. ### Claim 4 (depends on 1) The substrate processing apparatus of claim 1, wherein the first annular groove group, the second annular groove group, and the third annular groove group have a circular shape. ### Claim 5 (depends on 1) The substrate processing apparatus of claim 1, wherein the first annular groove group and the second annular groove group have a polygonal shape. ### Claim 6 (depends on 1) The substrate processing apparatus of claim 1, wherein the first annular groove group and the second annular groove group have a centrally asymmetrical shape. ### Claim 7 (depends on 1) The substrate processing apparatus of claim 1, wherein: the first inner annular groove has a plurality of first inner groove segments divided in a circumferential direction; the first intermediate annular groove has a plurality of first intermediate groove segments divided in a circumferential direction; the first outer annular groove has a plurality of first outer groove segments divided in a circumferential direction; and the at least one first gas supply path comprises a plurality of first gas supply paths respectively communicating with the plurality of first intermediate groove segments. ### Claim 8 (depends on 1) The substrate processing apparatus of claim 1, wherein: the second inner annular groove has a plurality of second inner groove segments divided in a circumferential direction; the second intermediate annular groove has a plurality of second intermediate groove segments divided in a circumferential direction; the second outer annular groove has a plurality of second outer groove segments divided in a circumferential direction; and the at least one second gas supply path comprises a plurality of second gas supply paths respectively communicating with the plurality of second intermediate groove segments. ### Claim 9 An electrostatic chuck, comprising: a chuck body portion with an upper surface and at least one first gas supply path, wherein: the upper surface has a plurality of protrusions and a first annular groove group; the first annular groove group comprises a first inner annular groove, a first intermediate annular groove, and a first outer annular groove; and any one of the first inner annular groove, the first intermediate annular groove, and the first outer annular groove communicates with the at least one first gas supply path; wherein the chuck body portion further has at least one second gas supply path; the upper surface of the chuck body portion further has a second annular groove group surrounding the first annular groove group; the second annular groove group comprises a second inner annular groove, a second intermediate annular groove, and a second outer annular groove; and any one of the second inner annular groove, the second intermediate annular groove, and the second outer annular groove communicates with the at least one second gas supply path; and wherein the chuck body portion further has at least one third gas supply path; the upper surface of the chuck body portion further has a third annular groove group surrounding the second annular groove group; the third annular groove group comprises a third inner annular groove and a third outer annular groove; and any one of the third inner annular groove and the third outer annular groove communicates with the at least one third gas supply path. ### Claim 10 (depends on 9) The electrostatic chuck of claim 9, wherein the first annular groove group, the second annular groove group, and the third annular groove group have a circular shape. ### Claim 11 (depends on 9) The electrostatic chuck of claim 9, wherein the first annular groove group and the second annular groove group have a polygonal shape. ### Claim 12 (depends on 9) The electrostatic chuck of claim 9, wherein the first annular groove group and the second annular groove group have a centrally asymmetrical shape. ### Claim 13 (depends on 8) The electrostatic chuck of claim 8, wherein: the first inner annular groove has a plurality of first inner groove segments divided in a circumferential direction; the first intermediate annular groove has a plurality of first intermediate groove segments divided in a circumferential direction; the first outer annular groove has a plurality of first outer groove segments divided in a circumferential direction; and the at least one first gas supply path comprises a plurality of first gas supply paths respectively communicating with the plurality of first intermediate groove segments. ### Claim 14 (depends on 8) The electrostatic chuck of claim 8, wherein: the second inner annular groove has a plurality of second inner groove segments divided in a circumferential direction; the second intermediate annular groove has a plurality of second intermediate groove segments divided in a circumferential direction; the second outer annular groove has a plurality of second outer groove segments divided in a circumferential direction; and the at least one second gas supply path comprises a plurality of second gas supply paths respectively communicating with the plurality of second intermediate groove segments.