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US 12,217,933 B2Granted
Detachable column unit of scanning electron microscope, and method for providing the same
AssigneeCoxem Co., Ltd
InventorJun Hee Lee
Life of this patent
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Abstract
The present invention provides a detachable column unit of a scanning electron microscope, and a method of providing the same, wherein the detachable column unit allows the column to be attached to and detached from the sample installation unit, and allows a simple correction related to the column, beam distortion, replacement of consumables, etc. Since problems related to the column are solved by replacing the column, the column has the advantage of being simple and easy to repair and maintain.
Claims6
A detachable column unit, comprising:
- a column (10) having a vacuum space (S1) in which a condenser lens (12) and an objective lens (13) are installed, and a membrane (19) being installed at a bottom of the column (10);
- and
- a membrane protective cover (20) being installed at the bottom of the column (10) to cover the membrane (19);
- wherein air is disallowed to pass through the membrane (19) while an electron generated by an electron gun (11) is allowed to pass through the membrane (19) to scan a sample,
- wherein a space formed by the membrane protective cover (20), the membrane (19), and the bottom of the column (10) is a sealed space,
- wherein the membrane protective cover (20) is removed before the column (10) is coupled to a sample installation unit (30).
3 more elements
A method for providing a detachable column unit of a scanning electron microscope, comprising:
- (a) making a vacuum inside a column (10) in a state in which the column (10) and a sample installation unit (30) are separated;
- (b) covering a membrane (19) at a bottom of the column 10 using a membrane protective cover (20) to protect the membrane (19);
- (c) after step (b), a space inside the membrane protective cover (20) is vacuumed to prevent the membrane (19) from being damaged due to a pressure difference between the space inside the membrane protective cover (20) and the inside of the column (10).
Dependencies are inferred from the claim text.