# US 12,216,410 B2 · Exposure apparatus and method of manufacturing article > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,216,410 B2 - Document ID: US12216410B2 - Status: Granted - Kind: B2 - Application number: 18/233,920 - Filed: 2023-08-15 - Published: 2023-12-07 - Granted: 2025-02-04 - Earliest claimed: 2021-07-13 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Keiji Emoto; Mamoru Kaneishi - Web page: https://patentgrep.com/patent/US12216410B2 ## CPC - G03F 7/70358: {Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging} - G03F 7/70725: {control} - G03F 7/70758: {Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving} - G03F 7/70775: {Position control, e.g. interferometers or encoders for determining the stage position} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract The present invention provides an exposure apparatus for performing scanning exposure on each of a plurality of shot regions in a substrate, comprising: a stage configured to hold the substrate; a driver configured to drive the stage; and a controller configured to control the scanning exposure on each of the plurality of shot regions while controlling the driver in accordance with a driving profile, wherein the driving profile includes a first section in which the stage is driven at a constant acceleration in a first direction, a second section in which the stage is driven at a constant acceleration in a second direction opposite to the first direction, and a connection section connecting the first section and the second section, and a period in which the scanning exposure is performed includes at least a part of the connection section. ## Claims ### Claim 1 An exposure apparatus for performing scanning exposure on each of a plurality of shot regions in a substrate, comprising: a stage configured to hold the substrate; a driver configured to drive the stage; and a controller configured to control the scanning exposure on each of the plurality of shot regions while controlling the driver in accordance with a driving profile for driving the stage, wherein the driving profile includes a first constant acceleration section in which velocity of the stage is changed at a first constant acceleration in a first direction, a second constant acceleration section in which velocity of the stage is changed at a second constant acceleration in a second direction opposite to the first direction, and a connection section connecting the first constant acceleration section and the second constant acceleration section such that an acceleration of the stage in the connection section continuously changes, in a period including at least a part of the connection section, the scanning exposure on one shot region among the plurality of shot regions is performed. ### Claim 2 (depends on 1) The apparatus according to claim 1, wherein the controller is configured to adjust a time width of the connection section, in accordance with one selected among a first case in which reduction of driving time of the stage is prioritized and a second case in which reduction of a positioning error of the stage is prioritized, such that the time width of the connection section in the first case is narrower than that in the second case. ### Claim 3 (depends on 2) The apparatus according to claim 2, wherein the controller is configured to adjust, as the time width of the connection section, a ratio of time of the connection section with respect to total time of the connection section and one of the first constant acceleration section or the second constant acceleration section. ### Claim 4 (depends on 1) The apparatus according to claim 1, wherein the connection section in the driving profile is formed in a curved shape that causes the acceleration of the stage to monotonically change between the acceleration in the first constant acceleration section and the acceleration in the second constant acceleration section. ### Claim 5 (depends on 1) The apparatus according to claim 1, wherein the connection section in the driving profile is formed in a sine wave shape. ### Claim 6 (depends on 1) The apparatus according to claim 1, wherein the connection section in the driving profile is formed in a shape expressed by a polynomial. ### Claim 7 (depends on 1) The apparatus according to claim 1, wherein the connection section in the driving profile is formed in a point-symmetric curved shape with a center point of the connection section as a point of symmetry. ### Claim 8 (depends on 1) The apparatus according to claim 1, wherein the connection section in the driving profile is formed such that, when the connection section is decomposed into a trigonometric series, a frequency of the trigonometric series is not higher than a bandwidth of a control system of driving of the stage. ### Claim 9 (depends on 1) The apparatus according to claim 1, wherein the driving profile is formed by a differentiable curve in an entire range. ### Claim 10 (depends on 1) The apparatus according to claim 1, wherein the scanning exposure on the one shot region is performed in a partial period of the connection section. ### Claim 11 (depends on 1) The apparatus according to claim 1, wherein the scanning exposure on the one shot region is performed in a period including the entire connection section, a part of the first constant acceleration section continuous with the connection section, and a part of the second constant acceleration section continuous with the connection section. ### Claim 12 (depends on 11) The apparatus according to claim 11, wherein in the period including at least a part of the connection section, the scanning exposure on the one shot region is performed while driving the stage in the first direction. ### Claim 13 (depends on 11) The apparatus according to claim 11, wherein a direction in which the stage moves in the first constant acceleration section changes from the second direction to the first direction, and a direction in which the stage moves in the second constant acceleration section changes from the first direction to the second direction. ### Claim 14 (depends on 1) The apparatus according to claim 1, wherein an absolute value of the acceleration of the stage in the first constant acceleration section and/or the second constant acceleration section of the driving profile is set to a maximum acceleration at which the driver can drive the stage. ### Claim 15 (depends on 1) The apparatus according to claim 1, wherein the connection section connects the first constant acceleration section and the second constant acceleration section with a curve so as not to include a period in which the stage moves at a constant velocity. ### Claim 16 (depends on 1) A method of manufacturing an article, the method comprising: forming a pattern on a substrate by using an exposure apparatus according to claim 1; processing the substrate, on which the pattern has been formed, to manufacture the article.