# US 12,216,407 B2 · Method and apparatus for multi-spray RRC process with dynamic control > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,216,407 B2 - Document ID: US12216407B2 - Status: Granted - Kind: B2 - Application number: 18/114,690 - Filed: 2023-02-27 - Published: 2023-07-13 - Granted: 2025-02-04 - Earliest claimed: 2018-11-30 - Assignees: Taiwan Semiconductor Manufacturing Company, Ltd. - Applicants: Taiwan Semiconductor Manufacturing Co., Ltd. - Inventors: Ming-Hsuan Chuang; Po-Sheng Lu; Shou-Wen Kuo; Cheng-Yi Huang; Chia-Hung Chu - Web page: https://patentgrep.com/patent/US12216407B2 ## CPC - G03F 7/162: {Coating on a rotating support, e.g. using a whirler or a spinner} - G03F 7/0048: {characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents} - H10P 72/0448: {Apparatus for applying a liquid, a resin, an ink or the like} - H10P 76/204: {of organic photoresist masks} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A multi-spray RRC process with dynamic control to improve final yield and further reduce resist cost is disclosed. In one embodiment, a method, includes: dispensing a first layer of solvent on a semiconductor substrate while spinning at a first speed for a first time period; dispensing the solvent on the semiconductor substrate while spinning at a second speed for a second time period so as to transform the first layer to a second layer of the solvent; dispensing the solvent on the semiconductor substrate while spinning at a third speed for a third time period so as to transform the second layer to a third layer of the solvent; dispensing the solvent on the semiconductor substrate while spinning at a fourth speed for a fourth time period so as to transform the third layer to a fourth layer of the solvent; and dispensing a first layer of photoresist on the fourth layer of the solvent while spinning at a fifth speed for a fifth period of time. ## Claims ### Claim 1 A method, comprising: dispensing a first layer of solvent on a substrate while spinning at a first speed for a first time period such that the first layer of the solvent covers a first area of the substrate with a first radius and a first thickness; dispensing the solvent on the substrate while spinning at a second speed for a second time period so as to transform the first layer to a second layer of the solvent such that the second layer of the solvent covers a second area of the substrate with a second radius and a second thickness, wherein the second speed is less than the first speed; and dispensing the solvent on the substrate while spinning at a third speed for a third time period so as to transform the second layer to a third layer of the solvent such that the third layer of the solvent covers a third area of the substrate with a third radius and a third thickness, wherein the first and second radii are less than the third radii, and wherein the first and third thicknesses are less than the second thickness. ### Claim 2 (depends on 1) The method of claim 1, wherein the first speed is in a range of 1500-3500 revolutions per minute (RPM). ### Claim 3 (depends on 2) The method of claim 2, wherein the second speed is in a range of 500-2500 RPM. ### Claim 4 (depends on 3) The method of claim 3, wherein the third speed is in a range of 2500-5000 RPM. ### Claim 5 (depends on 4) The method of claim 4, further comprising: dispensing the solvent on the substrate while spinning at a fourth speed for a fourth time period following the third time period so as to transform the third layer to a fourth layer of the solvent such that the fourth layer of the solvent covers a fourth area of the substrate with a fourth radius and a fourth thickness, wherein the first and second radii are less than the third and fourth radii, respectively, the first and third thicknesses are less than the second and fourth thicknesses, respectively, and wherein the fourth speed is in a range of 100-2000 RPM. ### Claim 6 (depends on 5) The method of claim 5, wherein the third speed is greater than the first speed and the second speed is greater than the fourth speed. ### Claim 7 (depends on 5) The method of claim 5, wherein the first time period and the third time period each equals to 30-50% of a summation of the first time period, the second time period, the third time period, and the fourth time period, wherein the summation is in a range of 0.6-12 seconds. ### Claim 8 (depends on 5) The method of claim 5, wherein the second time period and the fourth time period each equals to 20-30% of a summation of the first time period, the second time period, the third time period, and the fourth time period, wherein the summation is in a range of 0.6-12 seconds. ### Claim 9 (depends on 1) The method of claim 1, wherein each dispensing of the solvent is performed at a flow rate of 60-90 milliliter per minute (mL/m). ### Claim 10 A method, comprising: dispensing a first layer of solvent on a substrate while spinning at a first speed for a first time period such that the first layer of the solvent covers a first area of the substrate with a first radius and first thickness; dispensing the solvent on the substrate while spinning at a second speed for a second time period following the first time period so as to transform the first layer to a second layer of the solvent such that the second layer of the solvent covers a second area of the substrate with a second radius and second thickness; dispensing the solvent on the substrate while spinning so as to transform the second layer to a third layer of the solvent such that the third layer of the solvent covers a third area of the substrate with a third radius and a third thickness; dispensing the solvent on the substrate while spinning at a third speed for a third time period following the second time period so as to transform the third layer to a fourth layer of the solvent such that the fourth layer of the solvent covers a fourth area of the substrate with a fourth radius and fourth thickness, wherein the first and second radii are substantially equal to each other and each less than each of the third and fourth radii, and wherein the first and third thicknesses are substantially equal to each other and each less than each of the second and fourth thicknesses; dispensing the solvent on the substrate while spinning at a fourth speed for a fourth time period following the third time period so as to transform the fourth layer to a fifth layer of the solvent; dispensing a first layer of photoresist on the fifth layer of the solvent while spinning at a fifth speed for a fifth period of time following the fourth time period, wherein the second speed is less than the first speed and the third speed is greater than the first speed, the fourth speed is less than the second speed and the fifth speed is less than the fourth speed. ### Claim 11 (depends on 10) The method of claim 10, wherein the first speed is in a range of 1500-3500 revolutions per minute (RPM). ### Claim 12 (depends on 10) The method of claim 10, wherein the second speed is in a range of 500-2500 revolutions per minute (RPM). ### Claim 13 (depends on 10) The method of claim 10, wherein the third speed is in a range of 2500-5000 revolutions per minute (RPM). ### Claim 14 (depends on 10) The method of claim 10, wherein the fourth speed is in a range of 100-2000 revolutions per minute (RPM). ### Claim 15 (depends on 10) The method of claim 10, wherein the fifth speed is in the range of 50 to 500 revolutions per minute (RPM). ### Claim 16 (depends on 10) The method of claim 10, wherein the first time period and the third time period each equals to 30-50% of a summation of the first time period, the second time period, the third time period, and the fourth time period, wherein the summation is in a range of 0.6-12 seconds. ### Claim 17 (depends on 10) The method of claim 10, wherein the second time period and the fourth time period each equals to 20-30% of a summation of the first time period, the second time period, the third time period, and the fourth time period, wherein the summation is in a range of 0.6-12 seconds. ### Claim 18 A method, comprising: dispensing a first layer of solvent on a substrate while spinning at a first speed for a first time period such that the first layer of the solvent covers a first area of the substrate with a first radius and a first thickness; dispensing the solvent on the substrate while spinning at a second speed for a second time period following the first time period so as to transform the first layer to a second layer of the solvent such that the second layer of the solvent covers a second area of the substrate with a second radius and a second thickness; dispensing the solvent on the substrate while spinning at a third speed for a third time period following the second time period so as to transform the second layer to a third layer of the solvent such that the third layer of the solvent covers a third area of the substrate with a third radius and a third thickness; dispensing the solvent on the substrate while spinning at a fourth speed for a fourth time period following the third time period so as to transform the third layer to a fourth layer of the solvent such that the fourth layer of the solvent covers a fourth area of the substrate with a fourth radius and fourth thickness, wherein the first and second radii are substantially equal to each other and each different from the third and fourth radii, and wherein the first and third thicknesses are substantially equal to each other and each different from each of the second and fourth thicknesses; and dispensing a first layer of photoresist on the fourth layer of the solvent while spinning at a fifth speed for a fifth period of time, wherein the third speed is greater than the first speed, wherein the first speed is greater than the second speed, and wherein the second speed is greater than the fourth speed, wherein the first time period and the third time period are each greater than each of the second time period and the fourth time period. ### Claim 19 (depends on 18) The method of claim 18, wherein the first speed is in a range of 1500-3500 revolution per minute (RPM), the second speed is in a range of 500-2500 RPM, the third speed is in a range of 2500-5000 RPM, and the fourth speed is in a range of 100-2000 RPM. ### Claim 20 (depends on 18) The method of claim 18, wherein a summation of the first, second, third and fourth time periods is in a range of 0.6-12 seconds.