US 12,216,402 B2 · Photoacid generator

Abstract

The present invention relates to a novel photoacid generator compound cation, comprising an element having for 92 eV photons (extreme ultraviolet (EUV)) an absorption cross section of at least 0.5×107·cm2/mol; having at least two stable oxidation states; and selected from the elements of group 1 to group 15 of the periodic table of the elements. Additionally, the present invention relates to a photoacid generator comprising said photoacid generator compound cation and an anion. Furthermore, the present invention aims to provide a photoresist composition comprising said photoacid generator and an acid labile polymer. Finally, the present invention relates to a method of generating an acid using the photoresist composition and a method of forming a patterned materials feature on a substrate.

Claims10

Dependent claims

A photoacid generator compound cation using

Rn—X+
wherein X represents an element
(i) having for 92 eV photons (extreme ultraviolet (EUV)) an absorption cross section of at least 0.5×107·cm2/mol;
(ii) having at least two stable oxidation states;
and
(iii) selected from the elements of group 1 to group 15 of the periodic table of the elements;
R represents a linear or branched or a cyclic unsubstituted or substituted alkyl group having 1 to 20 carbon atoms;
or an unsubstituted or substituted aryl group having 3 to 30 carbon atoms;
or an unsubstituted or a substituted unsaturated or a saturated heterocyclic group having a 3 to 30 membered ring;
or derivatives thereof;
wherein at least two R groups are linked via a covalent bond with each other;
and
n is 2 to 5.

10 more elements

Dependencies are inferred from the claim text.

Facts

Application

18/503,696Filed 7 Nov 2023 · division

Priority

23 Nov 2020

Published

US 2024/0069442 A129 Feb 2024

Granted

4 Feb 2025

Term ends

Not estimatedThe source records don’t support an estimate.

Classification20 codes

G03F 7/0045
Photosensitive materials: with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
C07C 309/06
Of an acyclic saturated carbon skeleton: containing halogen atoms, or nitro or nitroso groups bound to the carbon skeleton
C07C 309/19
Having sulfo groups bound to acyclic carbon atoms: of a saturated carbon skeleton containing rings
C07C 309/30
Of non-condensed six-membered aromatic rings: of six-membered aromatic rings substituted by alkyl groups

Family

Application17/101,148Parent of this division · filed 23 Nov 2020

US 2024/0069442 A1Pre-grant publication · published 29 Feb 2024

US 11,846,886 B2Parent of this division

US 2022/0163886 A1Published application

US 12,216,402 B2This patent

From the US filing history. Foreign family members aren’t listed.

Photoacid generator

Life of this patent

Photoacid generator

Life of this patent

Abstract

Claims10