Directed self-assembly
AssigneeTokyo Electron Limited
InventorsLior Huli, Richard Farrell
Life of this patent
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AssigneeTokyo Electron Limited
InventorsLior Huli, Richard Farrell
Estimating the term…
A method for forming a device includes blending, in a mixer within a fabrication facility, a first liquid including a first block copolymer with a second liquid including a second block copolymer to form a first mixture. The first block copolymer includes a first homopolymer and a second homopolymer, where the first homopolymer has a first mole fraction in the first liquid. The second block copolymer includes the first homopolymer and the second homopolymer, the first homopolymer having a second mole fraction in the second liquid, the first mole fraction being different from the second mole fraction. The method includes placing a substrate over a substrate holder of a processing chamber within the fabrication facility; and coating the substrate with the first mixture within the processing chamber.
A method for forming a device comprising:
A method for forming a device, the method comprising:
A method for forming a device comprising:
Dependencies are inferred from the claim text.