# US 12,216,276 B2 · Mirror unit > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,216,276 B2 - Document ID: US12216276B2 - Status: Granted - Kind: B2 - Application number: 18/382,777 - Filed: 2023-10-23 - Published: 2024-02-15 - Granted: 2025-02-04 - Earliest claimed: 2019-01-30 - Assignees: Hamamatsu Photonics K.K. - Applicants: Hamamatsu Photonics K.K. - Inventors: Daiki Suzuki; Tomoyuki Ide; Yuki Morinaga - Web page: https://patentgrep.com/patent/US12216276B2 ## CPC - G02B 27/0031: {for scanning purposes} - G02B 5/08: Mirrors {(vehicle mirrors involving special optical features B60R1/08)} - G02B 26/0833: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)} - G02B 26/085: {the reflecting means being moved or deformed by electromagnetic means} - G02B 26/10: Scanning systems - G02B 26/101: {with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129)} - G02B 26/105: {with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence)} - G02B 27/0006: {with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation (G02B1/18 takes precedence; cleaning in general B08B)} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract A mirror unit includes an optical scanning device, a frame member, and a window member. The frame member includes first and second wall portions facing each other in an X-axis direction. The first wall portion is higher than the second wall portion. The window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface of the optical scanning device. In a cross-section parallel to the X-axis direction, the first wall portion is separated from a first line passing through a first end at a side of the first wall portion in the mirror surface and a first corner portion formed at the side of the first wall portion by an outer surface opposite to the frame member and a first side surface in the window member. ## Claims ### Claim 1 A mirror unit comprising: a base including a main surface and a rear surface opposite to the main surface, an optical scanning device including a movable portion and a mirror surface provided on the movable portion, the optical scanning device being disposed on a side of the main surface with respect to the base, a frame member disposed on the side of the main surface with respect to the base so as to surround the mirror surface when viewed from a first direction; and a window member attached to the frame member so as to cover an opening of the frame member, wherein the frame member includes a first wall portion and a second wall portion which face each other in a second direction perpendicular to the first direction, wherein the window member is disposed on top surfaces of the first wall portion and the second wall portion, wherein the main surface is provided with a depression, wherein at least part of the movable portion of the optical scanning device faces a bottom surface of the depression, wherein in a cross-section passing through the mirror surface and parallel to both the first direction and the second direction, at least one of a thickness of the first wall portion and a thickness of the second wall portion in the second direction, and also a thickness of the window member, are greater than a distance from a disposing surface of the base on which the optical scanning device is disposed to the bottom surface of the depression in the first direction, wherein a height of the first wall portion from the main surface of the base is greater than a height of the second wall portion from the main surface of the base, and wherein in the cross-section passing through the mirror surface and parallel to both the first direction and the second direction, a corner formed by an inner surface and a side surface of the window member, the side surface being on a side of the second wall portion, is on a side of the optical scanning device in the second direction relative to a corner formed by a top surface and an outer side surface of the second wall portion, the outer side surface being a surface opposite to the optical scanning device in the second direction. ### Claim 2 (depends on 1) The mirror unit according to claim 1, wherein the optical scanning device further includes a support portion supporting the movable portion so as to be swingable, and a thickness of the support portion is greater than the distance from the disposing surface of the base to the bottom surface of the depression in the first direction. ### Claim 3 (depends on 1) The mirror unit according to claim 1, wherein the optical scanning device further includes a support portion supporting the movable portion so as to be swingable, and at least part of the support portion faces the bottom surface of the depression via a space. ### Claim 4 (depends on 1) The mirror unit according to claim 1, wherein a thickness of the movable portion of the optical scanning device is smaller than the distance from the disposing surface of the base to the bottom surface of the depression in the first direction. ### Claim 5 (depends on 1) The mirror unit according to claim 1, wherein a height of the first wall portion is higher than a height of the second wall portion, the window member is inclined with respect to the mirror surface, and the height of the second wall portion is greater than the distance from the disposing surface of the base to the bottom surface of the depression in the first direction. ### Claim 6 (depends on 1) The mirror unit according to claim 1, wherein the depression includes a first depression formed on the main surface and a second depression formed on a bottom surface of the first depression, and wherein the optical scanning device is disposed on the bottom surface of the first depression. ### Claim 7 (depends on 1) The mirror unit according to claim 1, wherein the thickness of the window member is greater than a thickness of a part of the base where the depression is provided. ### Claim 8 (depends on 1) The mirror unit according to claim 1, wherein the base is bonded to the frame member by a bonding material. ### Claim 9 (depends on 1) The mirror unit according to claim 1, wherein the base and the frame member are integrally formed. ### Claim 10 A mirror unit comprising: a base including a main surface and a rear surface opposite to the main surface, an optical scanning device including a movable portion and a mirror surface provided on the movable portion, the optical scanning device being disposed on a side of the main surface with respect to the base, a frame member disposed on the side of the main surface with respect to the base so as to surround the mirror surface when viewed from a first direction; and a window member attached to the frame member so as to cover an opening of the frame member, wherein the frame member includes a first wall portion and a second wall portion which face each other in a second direction perpendicular to the first direction, wherein the window member is disposed on top surfaces of the first wall portion and the second wall portion, wherein the main surface is provided with a depression, wherein at least part of the movable portion of the optical scanning device faces a bottom surface of the depression, wherein in a cross-section passing through the mirror surface and parallel to both the first direction and the second direction, at least one of a thickness of the first wall portion and a thickness of the second wall portion in the second direction, and also a thickness of the window member, are greater than a distance from a disposing surface of the base on which the optical scanning device is disposed to the bottom surface of the depression in the first direction, and wherein the optical scanning device further includes a support portion supporting the movable portion so as to be swingable, and a thickness of the support portion is greater than the distance from the disposing surface of the base to the bottom surface of the depression in the first direction. ### Claim 11 (depends on 10) The mirror unit according to claim 10, wherein the optical scanning device further includes a support portion supporting the movable portion so as to be swingable, and at least part of the support portion faces the bottom surface of the depression via a space. ### Claim 12 (depends on 10) The mirror unit according to claim 10, wherein a thickness of the movable portion of the optical scanning device is smaller than the distance from the disposing surface of the base to the bottom surface of the depression in the first direction. ### Claim 13 (depends on 10) The mirror unit according to claim 10, wherein a height of the first wall portion is higher than a height of the second wall portion, the window member is inclined with respect to the mirror surface, and the height of the second wall portion is greater than the distance from the disposing surface of the base to the bottom surface of the depression in the first direction. ### Claim 14 (depends on 10) The mirror unit according to claim 10, wherein the depression includes a first depression formed on the main surface and a second depression formed on a bottom surface of the first depression, and wherein the optical scanning device is disposed on the bottom surface of the first depression. ### Claim 15 (depends on 10) The mirror unit according to claim 10, wherein the thickness of the window member is greater than a thickness of a part of the base where the depression is provided. ### Claim 16 (depends on 10) The mirror unit according to claim 10, wherein the base is bonded to the frame member by a bonding material. ### Claim 17 (depends on 10) The mirror unit according to claim 10, wherein the base and the frame member are integrally formed.