# US 12,216,273 B2 · Mirror unit

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- Number: US 12,216,273 B2
- Document ID: US12216273B2
- Status: Granted
- Kind: B2
- Application number: 18/526,305
- Filed: 2023-12-01
- Published: 2024-03-21
- Granted: 2025-02-04
- Earliest claimed: 2019-01-30
- Assignees: Hamamatsu Photonics K.K.
- Applicants: Hamamatsu Photonics K.K.
- Inventors: Daiki Suzuki; Tomoyuki Ide; Yuki Morinaga
- Web page: https://patentgrep.com/patent/US12216273B2

## CPC

- G02B 27/0031: {for scanning purposes}
- G02B 5/08: Mirrors {(vehicle mirrors involving special optical features B60R1/08)}
- G02B 26/0833: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)}
- G02B 26/085: {the reflecting means being moved or deformed by electromagnetic means}
- G02B 26/10: Scanning systems
- G02B 26/101: {with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129)}
- G02B 26/105: {with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence)}
- G02B 27/0006: {with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation (G02B1/18 takes precedence; cleaning in general B08B)}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

In a mirror unit, a first wall portion is higher than a second wall portion. A window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface. When any one of first to fourth wall portions is set as a first reference wall portion, in a cross-section perpendicular to the first reference wall portion, a first line passing through a first end at a side of the first reference wall portion in the mirror surface and a first corner portion formed at the side of the first reference wall portion by an outer surface and a first side surface in the window member intersects the first wall portion. A wiring portion includes a portion extending inside a base and leads outside a frame member.

## Claims

### Claim 1

A mirror unit comprising:
a base including a main surface and a rear surface opposite to the main surface;
an optical scanning device including a movable portion and a mirror surface provided on the movable portion, the optical scanning device being disposed on a side of the main surface with respect to the base;
a frame member disposed on the side of the main surface with respect to the base so as to surround the mirror surface when viewed from a first direction;
a window member attached to the frame member so as to cover an opening of the frame member; and
a wiring portion electrically connected to the optical scanning device,
wherein the wiring portion includes a penetrating portion extending inside the base so as to penetrate the base between the main surface and the rear surface,
wherein a length of the penetrating portion in the first direction is smaller than a thickness of a wall portion that forms the frame member, and
wherein the base includes a protruding portion located outside the frame member when viewed from the first direction, and the length of the penetrating portion in the first direction is smaller than a width of the protruding portion from the frame member to an end of the base.

### Claim 2 (depends on 1)

The mirror unit according to claim 1,
wherein a width of the penetrating portion is smaller than a thickness of the window member.

### Claim 3 (depends on 1)

The mirror unit according to claim 1,
wherein the optical scanning device further includes a support portion that supports the movable portion so that the movable portion is swingable, and the length of the penetrating portion in the first direction is larger than a thickness of the support portion.

### Claim 4 (depends on 1)

The mirror unit according to claim 1,
wherein the optical scanning device further includes a support portion that supports the movable portion so that the movable portion is swingable, and a width of the penetrating portion is smaller than a thickness of the support portion.

### Claim 5 (depends on 1)

The mirror unit according to claim 1,
wherein a width of the penetrating portion is smaller than a width of the protruding portion from the frame member to an end of the base.

### Claim 6 (depends on 1)

The mirror unit according to claim 1,
wherein the wiring portion further includes an extending portion connected to the penetrating portion at a side of the rear surface and extending on the base, and the extending portion extends from a connection part with the penetrating portion to reach the protruding portion at the side of the rear surface.

### Claim 7 (depends on 1)

The mirror unit according to claim 1,
wherein the window member is disposed on a top surface of the frame member and inclined with respect to the mirror surface.

### Claim 8 (depends on 1)

The mirror unit according to claim 1,
wherein the base is bonded to the frame member by a bonding material.

### Claim 9

A mirror unit comprising:
a base including a main surface and a rear surface opposite to the main surface;
an optical scanning device including a movable portion and a mirror surface provided on the movable portion, the optical scanning device being disposed on a side of the main surface with respect to the base;
a frame member disposed on the side of the main surface with respect to the base so as to surround the mirror surface when viewed from a first direction;
a window member attached to the frame member so as to cover an opening of the frame member; and
a wiring portion electrically connected to the optical scanning device,
wherein the wiring portion includes a penetrating portion extending inside the base so as to penetrate the base between the main surface and the rear surface,
wherein a length of the penetrating portion in the first direction is smaller than a thickness of a wall portion that forms the frame member, and
wherein the base includes a protruding portion located outside the frame member when viewed from the first direction, the wiring portion further includes an extending portion connected to the penetrating portion at a side of the rear surface and extending on the base, and the extending portion extends from a connection part with the penetrating portion to reach the protruding portion at the side of the rear surface.

### Claim 10 (depends on 9)

The mirror unit according to claim 9,
wherein a width of the penetrating portion is smaller than a thickness of the window member.

### Claim 11 (depends on 9)

The mirror unit according to claim 9,
wherein the optical scanning device further includes a support portion that supports the movable portion so that the movable portion is swingable, and the length of the penetrating portion in the first direction is larger than a thickness of the support portion.

### Claim 12 (depends on 9)

The mirror unit according to claim 9,
wherein the optical scanning device further includes a support portion that supports the movable portion so that the movable portion is swingable, and a width of the penetrating portion is smaller than a thickness of the support portion.

### Claim 13 (depends on 9)

The mirror unit according to claim 9,
wherein a width of the penetrating portion is smaller than a width of the protruding portion from the frame member to an end of the base.

### Claim 14 (depends on 9)

The mirror unit according to claim 9,
wherein the window member is disposed on a top surface of the frame member and inclined with respect to the mirror surface.

### Claim 15 (depends on 9)

The mirror unit according to claim 9,
wherein the base is bonded to the frame member by a bonding material.
