Apparatuses for radiation detection and methods of making them
AssigneeShenzhen Xpectvisiontechnology Co., Ltd.
InventorsYurun Liu, Peiyan Cao
Life of this patent
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Abstract
Disclosed herein are apparatuses for detecting radiation and methods of making them. The method comprises forming a recess into a semiconductor substrate, wherein a portion of the semiconductor substrate extends into the recess and is surrounded by the recess; depositing semiconductor nanocrystals into the recess, the semiconductor nanocrystals having a different composition from the semiconductor substrate; forming a first doped semiconductor region in the semiconductor substrate; forming a second doped semiconductor region in the semiconductor substrate; wherein the first doped semiconductor region and the second doped semiconductor region form a p-n junction that separates the portion from the rest of the semiconductor substrate.
Claims16
A radiation detector comprising:
- a semiconductor substrate;
- a recess in the semiconductor substrate, wherein a portion of the semiconductor substrate extends into the recess and is surrounded by the recess;
- semiconductor nanocrystals in the recess, the semiconductor nanocrystals having a different composition from the semiconductor substrate;
- a first doped semiconductor region in the semiconductor substrate;
- and
- a second doped semiconductor region in the semiconductor substrate;
- wherein the first doped semiconductor region and the second doped semiconductor region form a p-n junction that separates the portion from the rest of the semiconductor substrate.
A radiation detector comprising:
- an electrical insulator layer;
- a semiconductor layer supported directly on the electrical insulator layer;
- a through hole in the semiconductor layer, wherein a portion of the semiconductor layer extends into the through hole and is surrounded by the through hole;
- semiconductor nanocrystals in the through hole, the semiconductor nanocrystals having a different composition from the semiconductor layer;
- and
- an electrode through the electrical insulator layer, the electrode being in electrical contact to the portion.
Dependencies are inferred from the claim text.